Contact surface topography measuring method and instrument based on vertical displacement scanning

Abstract

A method for measuring surface morphology by contact means based on vertical displacement scan includes using computer to drive operation table to move vertical for carrying out measurement, scanning and collecting vertical movement distance of operation table and using it as measurement data, inputting measurement date into computer and using it as collected Z coordinate on X-Y-Z coordinate, collecting multiple coordinate measurement data by moving operation table and obtaining measured work piece surface morphology after said data is processed by computer.

Description

technical field [0001] The invention relates to a contact surface topography measuring method and measuring instrument based on vertical displacement scanning, belonging to the technical field of measuring devices. Background technique [0002] There are many types of contact surface topography measuring instruments currently in use, such as the Form Talysurf series products developed and produced by the British Rank Taylor Hobson Company, but for the existing contact surface topography measuring instruments, they have some common problems: [0003] (1) Since only the stylus rotates around the fulcrum of the lever during the measurement process, there is a principle error of the traditional stylus measurement method; [0004] (2) When the inductor works in the nonlinear region, there is a nonlinear error; [0005] (3) Large-scale measurement cannot be performed, such as curved surface, groove and small arc measurement, etc.; [0006] (4) The larger the range, the larger th...

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Problems solved by technology

[0003] (1) Since only the stylus is rotating around the fulcrum of the lever during the measurement process, there is a principle error of the traditional stylus measurement method;

[0004] (2) When the inductor works in the nonlinear region, there is a nonlinear error;

[0005] (3) Large-scale measurement cannot be performed, such as surface, groove and small arc measurement;

[0007] The above problems reflect the shortcomings of these instruments, which limit their ability to make large-scale measurements

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