Method of manufacturing substrate for ink jet recording head and method of manufacturing recording head
A technology of inkjet recording and manufacturing method, applied in printing and other directions, can solve the problems of inability to play the role of insulating protective layer, local temperature rise, disconnection of heating resistance layer, etc.
Active Publication Date: 2010-02-10
CANON KK
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Problems solved by technology
[0003] here, for example in Figure 9 In this method, the end portions 203a of the two electrode layers 203 facing the heating portion 207 are formed to have some inclinations, but this has the problem that if the inclination of the end surfaces 203a is closer to vertical with respect to the heating resistor layer 204, the end surfaces 203a will cover the Insufficient coverage occurs on the insulating protective layer 205 of the portion 210 rising from the heating resistance layer 204, and the function as an insulating protective layer cannot be performed.
Therefore, when the heating resistor composed of the pair of electrode layers 203 and the heating resistor layer 204 is driven, the heating resistor layer on the end surface 203a (the portion where a step is formed with respect to the lower layer 202 ) facing the pair of electrode layers 203 occurs. Current concentration, local temperature rise, and thermal stress may occur
In addition, in order to adapt to the increasingly demanding high-speed and high-definition recording, in the case of continuously driving the heating resistor with high frequency, stronger thermal stress will occur, which will increase the possibility of disconnection of the heating resistor layer. Big
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[0019] Hereinafter, the present invention will be specifically described using examples with reference to the drawings as necessary.
[0020] figure 1 It is a schematic plan view showing the structure of the inkjet recording head substrate of the present invention, particularly a plan view showing the vicinity of the heat acting portion 107 of the head substrate. in addition, figure 2 express figure 1 A model section view of the section at line 2-2 in .
[0021] exist figure 2 In the inkjet recording head substrate of the shown form, the heat generating resistor layer 104 covers the pair of electrode layers 103 formed on the insulating lower layer (heat storage layer) 102 formed on the surface of the substrate 101, and the lower layer 102 Correspondingly, a recess is provided between a pair of electrode layers.
[0022] When electric power is supplied to the heating resistor composed of the electrode layer 103, the heating resistor layer 104, etc., the heat generated in...
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In order to form a more homogenous heat generating resistive layer, the present invention provides a method of manufacturing a substrate for an ink jet recording head having a support which has an insulative layer on its surface, a pair of electrode layers disposed on the surface of the support, and a heat generating resistive layer which continuously covers the pair of electrode layers and a section between the pair of electrode layers. The method includes the step of forming an electrode layer on the support and the step of forming the pair of electrode layers by etching the electrode layer.In the step of forming the pair of electrode layers by etching the electrode layer, by etching a surface portion of the insulative layer positioned between the pair of insulative layers, a recess isformed in the surface portion of the insulative layer.
Description
technical field [0001] The present invention relates to a method of manufacturing an inkjet recording head substrate and a method of manufacturing a recording head using the substrate manufactured by the method. Background technique [0002] For example, in Japanese Patent Application Laid-Open No. 60-159062 figure 1 or image 3 describes an inkjet recording head that constitutes a nozzle provided for ejecting a liquid, and a heat-applying portion that communicates with the nozzle as a portion that acts on the liquid with thermal energy for ejecting liquid droplets. part. Figure 9 is shown in the prior patent publication with the figure 1 corresponding structure. In this structure, a heating resistor layer 204 that generates heat when energized is provided on the lower layer 202 of the base body 200 , and a pair of electrode layers 203 are provided on the heating resistor layer 204 for one heating portion. In addition, on the heating resistance layer 204 and the electr...
Claims
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IPC IPC(8): B41J2/16B41J2/135
Inventor 小室博和尾崎照夫小山修司久保康祐照井真早川和宏柬理亮二加藤雅隆
Owner CANON KK