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Microscope device

A technology for microscopes and objective lenses, applied in the field of microscope devices, can solve problems such as expensive devices, and achieve the effect of easy alignment operations

Inactive Publication Date: 2010-08-25
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result the device becomes very expensive

Method used

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  • Microscope device
  • Microscope device
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Examples

Experimental program
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Effect test

no. 1 approach

[0032] FIG. 1 shows a measuring microscope device according to a first embodiment of the present invention. As shown in FIG. 1 , the measuring microscope apparatus of the present embodiment includes an XY stage 22 for horizontally moving a subject 21 and an observation optical system 10 for observing the subject 21 . The observation optical system 10 has: an objective lens 11 positioned near the subject 21; an imaging lens 12 constituting an imaging optical system together with the objective lens 11; and an eyepiece 13 for visually observing an image formed by the objective lens 11 and the imaging lens 12.

[0033] The measuring microscope apparatus also has: a Z stage 15 that moves the objective lens 11 up and down along the optical axis of the observation optical system 10 for focusing; a focus detection system 30 that irradiates measurement light onto the subject 21 through the objective lens 11 , and detect the focus relative to the subject 21 according to the measurement ...

no. 2 approach

[0049] FIG. 5 shows a measuring microscope device according to a second embodiment of the present invention. In FIG. 5 , components denoted by the same reference numerals as those shown in FIG. 1 denote the same components, and detailed description thereof will be omitted.

[0050] In this embodiment, the rotation mechanisms 52a, 52b can rotate the wedge prisms 51a, 51b around the optical axis by electric power. At the initial position, the arrangement angles of the wedge prisms 51a and 51b are the same.

[0051] As can be seen from FIG. 5 , the measuring microscope device of this embodiment further includes a driver 61 , a computing unit 62 , and an input unit 63 in addition to the structure of the measuring microscope device of the first embodiment. The input unit 63 is an instructing unit for instructing a measurement position within the observation field of view, and is composed of, for example, a trackball, a joystick, a mouse, or the like. The computing unit 62 is mean...

no. 3 approach

[0069] This embodiment is directed to a mechanical operation mechanism for operating the rotation mechanisms 52a, 52b. This operating mechanism mechanically sets the arrangement angles of the wedge prisms 51a and 51b. The movement of the irradiation position of the measurement light by the wedge prisms 51a and 51b is the same as that of the first embodiment.

[0070] 8 to 10 show an operating mechanism according to a third embodiment of the present invention. In FIGS. 8 to 10, the operating mechanism has: ring-shaped pulleys 71a, 71b, which are fixed to wedge prisms 51a, 51b; rotatably supported pulleys 73a, 73b; belts 72a, 72b, which are respectively Hanging between the pulleys 71a, 71b and the pulleys 73a, 73b; rods 74a, 74b, which are respectively fixed on the pulleys 73a, 73b; and rods 75a, 75b, which are respectively connected to the rods 74a, 74b.

[0071] The pulleys 71a, 71b are arranged at the same center, and the pulleys 73a, 73b are also arranged at the same cente...

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Abstract

The invention provides a microscope device capable of easily peforming aligning operation of measure points and having a low price. The microscope device is provided with an XY objective table (22) which horizontally moves an article to be examined; an observation optical system (10) used for observe the article to be examined; a Z objective table (15) which moves an object lens (11) for observing an optical system; a focus detection system (30) which irradiates a measure light to the article to be examined and detects focusing; a translucence lens (17) which optically combines the focus detection system and the object lens; a signal processing unit (41) which controls the Z objective table according to a detection result of the focus detection system; and a measuring unit (42) which measures a shifting amount of the object lens moving through the Z objective table. The microscope device further includes two cuneate prisms (51a, 51b) configured on an optical path between the focus detection system and the translucence lens; and a rotation mechanism (52a, 52b) which holds the translucence lens in a ratatable state.

Description

technical field [0001] The invention relates to a microscope device. Background technique [0002] One type of microscope device is a measuring microscope device. The measuring microscope unit has the function of measuring the height of samples such as finely processed objects and electronic components under optical microscope observation. Some measuring microscope devices also have the function of automatic focus detection. FIG. 12 shows an example of such a measuring microscope device. [0003] In FIG. 12 , the subject 21 is illuminated by an unillustrated lighting system. The illuminated subject 21 is imaged by the objective lens 11 and the imaging lens 12 . The formed image can be visually observed through the eyepiece 13 . [0004] A half mirror 17 is arranged on the optical path between the objective lens 11 and the imaging lens 12, and a focus detection system 30' is arranged on the reflected light path reflected by the half mirror 17. In the focus detection sys...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/04
CPCG01B9/04G01B11/0608G02B7/004G02B7/09G02B21/04
Inventor 山岸毅
Owner OLYMPUS CORP