Seal structure of turbo-molecular pump

A technology of turbomolecular pump and sealing structure, which is applied in the direction of pumps, parts of pumping devices for elastic fluids, pump elements, etc. Longer and other problems, to achieve the effect of short axial length
CN101099043AInactive Publication Date: 2008-01-02OSAKA VACUUM
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
OSAKA VACUUM
Publication Date
2008-01-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

A seal structure of a turbo-molecular pump capable of preventing exhaust gases and dust from invading into the bearing part and the motor part of the turbo-molecular pump and enabling a reduction in the length of a seal part. The seal structure comprises a bush (12) radially swingably fitted to the stationary member (10) of the housing of the turbo-molecular pump (1) and a journal shaft part (8a) rotatably inserted into the inner peripheral part of the bush (12). Herringbone type grooves (8b) are recessed in the outer peripheral part of the journal shaft part (8a) and clearance seal parts (8c) are formed in the journal shaft part (8a) and the bush (12) adjacently to the herringbone type grooves (8b).
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Description

technical field

[0001] The present invention relates to a sealing structure of a turbomolecular pump which is most suitable for vacuum discharging process gas containing corrosive gas and easily condensed gas and the like. Background technique

[0002] As a sealing structure of a turbomolecular pump, the applicant previously proposed the following sealing structure of a turbomolecular pump (refer to Patent Document 1): As shown in FIG. 7, a turbomolecular pump a supporting a rotating shaft through a rolling bearing includes a A cylindrical bushing c fitted into the stationary member b of the casing of the turbomolecular pump a, and a journal shaft portion (journal shaft) rotatably inserted through the inner peripheral portion of the bushing c with a very small gap d. A herringbone groove e and a threaded groove f are recessed on the outer peripheral portion of the journal shaft portion d, and a purge gas is introduced between the bush c and the journal shaft portion d. [0...

Claims

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