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Coating device

A technology of coating device and driving device, which is applied to devices for coating liquid on the surface, coatings, photo-engraving process coating equipment, etc. problem, to achieve stable coating and suppress undulations

Active Publication Date: 2013-03-20
AIMECHATEC LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when the slit nozzle moves in the horizontal direction, the position of the center of gravity of the gate-shaped moving mechanism, etc. becomes high, and fluctuations occur, making the coating unstable, and there is a problem that a uniform film thickness cannot be obtained.

Method used

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Examples

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Embodiment Construction

[0025] Embodiments of the present invention will be described below with reference to the drawings. figure 1 is a side view of the coating device of the present invention, figure 2 yes figure 1 The top view of the main part of the image 3 is an enlarged view of the drive unit, Figure 4 yes image 3 A direction to the view, Figure 5 yes image 3 View from direction B.

[0026] As for the coating device, a stage 2 on which a substrate W is placed is fixed on a base 1, and moving bodies 3, 3 are arranged along both sides of the stage 2, and the moving body 3 moves in the horizontal direction (with figure 1 The vertical direction of the paper surface) is removable.

[0027] In this embodiment, the mobile body 3 is moved by a linear motor. That is, rails 4 , 4 are provided on the side frames of the stage 2 , and the rails 4 engage with the guide grooves 5 of the moving body 3 . Then, the stator 6 of the linear motor is arranged parallel to the above-mentioned rail 4, a...

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PUM

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Abstract

A coater is provided to inhibit pitching when a travel body travels horizontally along a rail during the coating process of a slit nozzle, thereby improving the stability of coating. A coater comprises a travel body(3) which can move along the both sides of a substrate-loaded stage(2); and a slit nozzle(10) which is maintained at the travel body so as to go up and come down, wherein a drive device(11) for ascending or descending the slit nozzle is mounted on the travel body, and the center(G1) of the drive device is lower than the center(G2) of the slit nozzle. Preferably the travel body is installed independently at the both sides of the substrate-loaded stage, and the each travel body is provided with a drive device.

Description

technical field [0001] The present invention relates to a coating device for coating a coating liquid on a substrate surface such as a glass substrate. Background technique [0002] When forming a coating on a glass substrate, a coating liquid for forming the coating is applied, and the coating liquid is dried (baked) to form a coating. Coating devices for this use are known in Patent Documents 1 to 6. [0003] In the coating device disclosed in Patent Document 1, rails are provided on both sides of a base, a moving table is attached to these rails, and a slit nozzle is attached to the moving table via an elevating cylinder. [0004] In the coating device disclosed in Patent Document 2, a U-shaped frame with an open upper side is arranged across the stage on which the glass substrate is placed from below, and a narrow U-shaped frame is installed between the upper ends of the U-shaped frame. seam nozzle. A mechanism for raising and lowering the slit nozzle is not disclosed...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/02B05C11/02
CPCB05C5/02G03F7/16
Inventor 升芳明宫本英典吉泽健司曽根康博
Owner AIMECHATEC LTD
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