Method for producing siOx (X<1)
A x is not necessarily satisfactory and other problems, to achieve the effect of excellent initial charging efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1 to 3 and comparative example 1 and 2
[0033] SiO is produced using the production system shown in Figure 1 x . The amount of silicon oxide powder (325# PASS) shown in Table 1 was placed in the second material tray (5) as a starting material for generating silicon oxide gas, and the amount of metal silicon powder shown in Table 1 was placed in the first- in the material tray (4). The material tray was inserted into a reaction tube (2) with a diameter of 80 mm. Next, the inside of the reaction furnace is evacuated to a pressure of up to 0.1 Torr with a vacuum pump, and then the first material tray (4) is heated and maintained at 2,200°C with a heater (1), while the second material tor and maintained at 1,430°C. After this operation was continued for 5 hours, the temperature was lowered to room temperature in order to precipitate the gas on the substrate (3). In Figure 1, "6" represents a thermocouple.
[0034] Next, in a 2 L alumina ball mill, 1,000 g of alumina balls with a diameter of 5 mm were used as a med...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 