Circular and multi-ring shaped axial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope

Abstract

An electrostatic rotary micro-gyroscope with cylindrical and multi-ring-shaped axial magnetizing, permanent magnetic and diamagnetic rotors belongs to the field of the micro-electromechanical system and comprises an upper stator, rotors and a lower stator. The invention can realize uncontrolled self-supporting suspension by providing suspension force and lateral stabilizing force to diamagnetic rotors by the cylindrical and multi-ring-shaped axial magnetizing and permanent magnet in the upper and the lower stators, and can realize high-speed rotation of the rotors by a variable-capacitance motor formed by the rotating electrodes of the upper and the lower stators and the rotors, and meanwhile, the axial detection of the upper and the lower stators, the lateral detection of a feedback electrode and the lower stator and the electrostatic force between the feedback electrode and the rotors can be used for improving the axial rigidity, the lateral rigidity and the shock resistance of the micro-gyroscope, improving stable suspension performance, and reducing supporting and supporting control difficulties of the rotors, so as to realize self-stabilization without complex control mechanisms. The invention has the advantages of low power consumption, convenient implementation and small size; and can be used for measuring the acceleration of three axes along X-axis, Y-axis and Z-axis and the two axial angle acceleration around the X-axis and the Y-axis at the same time.

Description

technical field [0001] The invention relates to a miniature gyroscope in the field of micro-electromechanical technology, in particular to a circular and multi-ring axially magnetized permanent-magnet anti-magnetic rotor electrostatically rotating micro-gyroscope. Background technique [0002] The inertial navigation system is an autonomous navigation technology that directly calculates the navigation parameters such as the position, heading and attitude of the carrier according to Newton's law of inertia. During the working process, it neither transmits energy to the outside world nor obtains information from the outside. It has unique advantages such as being free from interference, can be used anywhere, has good dynamic performance, and rich navigation output information. It is widely used in the fields of aviation, aerospace and navigation. It has been widely used, and the emergence of MEMS (Micro-electromechanical Systems, micro-electromechanical systems) technology has...

AI Technical Summary

Problems solved by technology

Its shortcoming is that radial control electrodes for controlling the radial (X, Y) position of the rotor are arranged on the radially inner and outer sides of the rotor; Axial control electrodes for axial position suspension control, so that the suspension support of the rotor needs to control 5 degrees of freedom, which greatly increases the requirements for the suspension support of the rotor, and the process is also more complicated

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