Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor electrostatic rotating micro gyroscope

Abstract

A circular and multi-ring axial radial magnetization permanent magnet anti-magnetic rotor electrostatic rotating micro-gyroscope in the field of micro-electromechanical systems, consisting of an upper stator, a rotor and a lower stator, relying on cylindrical and multi-ring shapes in the upper and lower stators Axial and radial magnetized permanent magnets provide levitation force and lateral stabilizing force to the anti-magnetic rotor to realize uncontrolled self-stabilizing suspension. The rotating electrodes of the upper and lower stators and the rotor form a variable capacitance motor, which pulls the rotor to rotate at high speed, and at the same time Use the axial detection of the upper and lower stators, the feedback electrodes and the lateral detection of the lower stator, and the electrostatic force between the feedback electrodes and the rotor to improve the axial stiffness, lateral stiffness and impact resistance of the micro gyroscope, enhance the stable suspension performance, and reduce the It eliminates the starting process of the rotor and the difficulty of starting control. It can achieve self-stabilization without complicated control mechanism. It has low power consumption, convenient implementation, and small size. X, Y two-axis angular acceleration.

Description

technical field [0001] The invention relates to a miniature gyroscope in the field of micro-electromechanical technology, in particular to an electrostatic rotating micro-gyroscope with a circular and multi-ring axially and radially magnetized permanent magnet antimagnetic rotor. Background technique [0002] The inertial navigation system is an autonomous navigation technology that directly calculates the navigation parameters such as the position, heading and attitude of the carrier according to Newton's law of inertia. During the working process, it neither transmits energy to the outside world nor obtains information from the outside. It has unique advantages such as being free from interference, can be used anywhere, has good dynamic performance, and rich navigation output information. It is widely used in the fields of aviation, aerospace and navigation. It has been widely used, and the emergence of MEMS (Micro-electromechanical Systems, micro-electromechanical systems...

AI Technical Summary

Problems solved by technology

Its shortcoming is that radial control electrodes for controlling the radial (X, Y) position of the rotor are arranged on the radially inner and outer sides of the rotor; Axial control electrodes for axial position suspension control, so that the suspension support of the rotor needs to control 5 degrees of freedom, which greatly increases the requirements for the suspension support of the rotor, and the process is also more complicated

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