Circular and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope

Abstract

A circular and multi-annular axially radially magnetized anti-magnetized rotor charge relaxation rotating micro-gyroscope in the field of micro-electromechanical systems. Axial and radial magnetized permanent magnets provide levitation force and lateral stabilizing force to the anti-magnetic rotor to realize uncontrolled self-stabilizing suspension, and use charge relaxation to realize constant high-speed rotation of the rotor without speed detection. At the same time, the axial stiffness, lateral stiffness, and impact resistance of the micro-gyroscope are improved by using the axial detection of the upper and lower stators, the lateral detection of the feedback electrode and the lower stator, and the electrostatic force between the feedback electrode and the rotor, and the stable suspension performance is enhanced. , which reduces the difficulty of the starting process and control of the rotor, can achieve self-stabilization without complicated control mechanism, low power consumption, convenient implementation, small size, and can simultaneously detect three-axis accelerations including along the X, Y, and Z axes And two-axis angular acceleration around the X and Y axes.

Description

technical field [0001] The invention relates to a miniature gyroscope in the field of micro-electromechanical technology, in particular to a circular and multi-ring axial radially magnetized diamagnetic rotor charge relaxation rotating micro-gyroscope. Background technique [0002] The inertial navigation system is an autonomous navigation technology, which directly calculates the navigation parameters such as the position, heading and attitude of the carrier according to Newton's law of inertia. In the process of work, it neither transmits energy to the outside world nor obtains information from the outside world. It has the unique advantages of being free from interference, being usable anywhere, having good dynamic performance, and rich navigation output information. It has been widely used, and the emergence of MEMS (Micro-electromechanical Systems, micro-electromechanical systems) technology promotes the development of inertial navigation systems in the direction of low...

AI Technical Summary

Problems solved by technology

This technology has the following shortcomings. The suspension support of the rotor needs to control 5 degrees of freedom, which greatly increases the requirements for the suspension support of the rotor. Since the rotor is rotated at a high speed by using a variable capacitor, there must be separate electrodes or equivalent electrodes on the stator and rotor. land area, complex structure

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