Electrostatic repulsion force driven MEMS distorting lens
A technology of electrostatic repulsion and deformable mirror, applied in the direction of optical components, optics, instruments, etc., can solve the problems of device failure, electrostatic pull-in, small travel, etc., to improve the ability to correct aberrations, eliminate static pull-in, increase The effect of the itinerary
Inactive Publication Date: 2008-08-06
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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[0002] In the field of deformable mirrors, electrostatically driven MEMS deformable mirrors have the advantages of fast response, low energy consumption, small size, high unit density and good compatibility with integrated circuits, and become a micro-deformable mirror with the most development potential; however , the existing electrostatically driven MEMS deformable mirrors are driven based on electrostatic attraction, and their disadvantages are small travel and the image of electrostatic pull-in
The maximum stroke of this deformable mirror will not exceed 1 / 3 of the initial gap between the upper and lower electrodes due to the phenomenon of electrostatic pull-in; once the phenomenon of electrostatic pull-in occurs, the upper and lower electrodes will be short-circuited, resulting in the failure of the entire device
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[0023] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0024] In the following, a MEMS segmented deformable mirror driven by electrostatic repulsion, which is a square of 400 μm×400 μm in size, is taken as an example, and the present invention will be described in detail with reference to the accompanying drawings.
[0025] The bottom layer of the deformable mirror is a silicon substrate, and the layer above the silicon substrate is Si 3 N 4 Insulating layer, on the insulating layer is the lower pole plate 3, the structural diagram of the lower pole plate 3 is as shown in Figure 1, wherein the material of the lower pole plate 3 is polysilicon or metal, and it is arranged outside each edge of the lower pole plate 3 There are three strip-shaped lower electrodes 4, lower electrodes 5 and lower electrodes 6. The power terminal 1 is connected to the lower electrode 5, the lower plate 3 and the anchor...
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The present invention discloses an MEMS distorting lens driven by electrostatic repulsion force, comprising two power source terminals; a silicon substrate; a Si3N4 insulation layer positioned on the substrate; a polysilicon or a metal lower polar plate and a lower polar plate anchor point, both are positioned on the insulation layer; a polysilicon or a metal upper polar plate, an upper polar plate anchor point and an upper polar plate support beam, which are positioned at the upper side of the lower polar plate; the MEMS distorting lens is characterized in that the external of each side or one of every two adjacent sides of the lower polar plate is provided with three bar lower electrodes; the MEMS distorting lens driven by electrostatic repulsion force of the invention is capable of eliminating electrostatic pull-in phenomenon and enhancing optical chromatic aberration correction capacity, and has a simple structure; and the MEMS distorting lens driven by electrostatic repulsion force is capable of forming continuous or separated mirror faces, a self-adaptive optical system formed by the mirror faces can be suitable for various optical systems which require large stroke distorting lens, so that the MEMS distorting lens has very important application value.
Description
technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to an electrostatically driven MEMS deformable mirror suitable for an adaptive optical system. Background technique [0002] In the field of deformable mirrors, electrostatically driven MEMS deformable mirrors have the advantages of fast response, low energy consumption, small size, high unit density and good compatibility with integrated circuits, and become a micro-deformable mirror with the most development potential; however , the existing electrostatically driven MEMS deformable mirrors are all driven based on electrostatic attraction, and their disadvantages are small strokes and the presence of electrostatic pull-in images. The maximum stroke of the deformable mirror will not exceed 1 / 3 of the initial gap between the upper and lower electrodes due to the influence of the electrostatic pull-in phenomenon; once the electrostatic pull-in phenomenon o...
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Inventor 姚军胡放荣邱传凯
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI