Off-centering quantity measuring apparatus
A technology for measuring devices and eccentricity, which is applied to measuring devices, adopting optical devices, and testing optical properties, etc., to prevent the reduction of measurement accuracy and shorten the required time.
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[0031] Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. figure 1 It is a schematic configuration diagram of an eccentricity measurement device according to an embodiment of the present invention.
[0032] figure 1 The shown eccentricity measurement device 1 applies the autocollimation method to measure the eccentricity of each inspected surface of a lens body 5 as an optical element to be inspected, and includes a measuring head 10, and a base 20 that rotatably holds the lens body 5 , an analytical calculation unit 30 for performing various calculations for calculating the amount of eccentricity, and a Z-axis stage 40 for holding the measuring head 10 so as to be movable in the vertical direction in the figure.
[0033] The above-mentioned measuring head 10 is equipped with: a light source 11, which outputs the light beam irradiated on the above-mentioned lens body 5; Referred to as "index line"); beam ...
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