Cleaning apparatus, cleaning tank, cleaning method and computer-readable storage medium

A cleaning device and cleaning tank technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problem of degraded cleaning fluid cleanliness, failure to describe flow control device to form a predetermined flow, etc. problems, to achieve the effect of optimizing cleaning time, stabilizing cleaning quality and improving quality

Inactive Publication Date: 2009-02-11
FUJITSU LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] However, unlike the present invention, for the technique disclosed in Patent Document 4, there is no description about forming a predetermined flow in the cleaning fluid in the cleaning tank using a flow control device.
Therefore, similarly to the case of each of the above-mentioned Patent Documents 2 and 3, the problem of deteriorating the cleanliness of the cleaning fluid due to an increase in the amount of the contaminants due to the presence of a large amount of the contaminants to be removed cannot be solved. For example, it will accumulate near the cleaning objects and in the corners of the cleaning tank, which prevents the discharge of pollutants

Method used

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  • Cleaning apparatus, cleaning tank, cleaning method and computer-readable storage medium
  • Cleaning apparatus, cleaning tank, cleaning method and computer-readable storage medium
  • Cleaning apparatus, cleaning tank, cleaning method and computer-readable storage medium

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Embodiment Construction

[0049] First, before describing a cleaning device, a cleaning tank, and a cleaning method according to an embodiment of the present invention, a conventional cleaning method and its problems will be described with reference to FIG. 1 .

[0050] Fig. 1 is a side view of a cleaning tank for explaining a conventional cleaning method. As shown in FIG. 1, in a conventional cleaning method, a cleaning object D such as a small device is immersed in a cleaning liquid (or cleaning fluid) WL in a cleaning tank 100, and under this condition, an ultrasonic vibrator 110 is used to clean Ultrasonic waves are applied to the liquid WL. Then, the contamination CT on the surface of the cleaning object D is peeled off by the cavitation phenomenon. The cleaning liquid WL is continuously supplied into the cleaning tank 100 through the supply hole 120, and the pollutants stripped from the cleaning object are transported by the cleaning liquid flowing on the top surface of the cleaning tank, and th...

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Abstract

The cleaning apparatus for cleaning a cleaning target set in a cleaning tank filled with a washing fluid includes a flow-control unit for generating a predetermined flow of the washing fluid in the cleaning tank; and an ejection unit for ejecting the washing fluid disposed on a flow path of the predetermined flow of the washing fluid. The cleaning apparatus ejects the washing fluid to outside the cleaning tank by using the ejection unit in removing contaminants on a surface of the cleaning target by washing the cleaning target with the washing fluid. Also, a cleaning tank having substantially the same structure as that of the cleaning apparatus is provided. Moreover, a cleaning method implemented using the cleaning apparatus as described above or the like is provided.

Description

technical field [0001] The present invention relates to a cleaning device, a cleaning tank, a cleaning method, and a computer-readable storage medium storing a cleaning control program. Contaminants on surfaces of objects (eg, various devices). [0002] More specifically, the present invention is intended to provide a technology that is effective in processing various types of devices including small devices (for example, magnetic heads of HDD (HDD: Hard Disk Drive), MEMS (Micro Electro Mechanical System : a system with miniaturized electronic circuits combined with mechanical components), and optical components (mirrors and lenses)) can achieve high quality when cleaning various devices placed in the cleaning tank by cleaning fluid cleaning, and this technique is described here. Background technique [0003] In recent years, with the increasing demand for precision of small devices such as magnetic heads of HDDs, MEMS, and optical components, and the need for miniaturizat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/10B08B3/12
CPCB08B3/12B08B3/04B08B3/14B08B3/10B08B2203/007
Inventor 野村进直柳田芳明须藤浩二小林秀祐芝野俊春
Owner FUJITSU LTD
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