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Light-emitting device, method for manufacturing light-emitting device, and substrate processing apparatus

A technology for a substrate processing device and a light-emitting element, which is used in electroluminescent light sources, semiconductor/solid-state device manufacturing, lighting devices, etc. Effect

Inactive Publication Date: 2009-03-11
TOKYO ELECTRON LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, there is a problem that the above-mentioned substrate 11 and the mask (stencil mask) mounted on the substrate 11 become high temperature during vapor deposition of the organic layer.
Therefore, the mask mounted on the substrate may be deformed by heat, the accuracy of pattern formation by mask vapor deposition may deteriorate, and the quality of the light emitting element may deteriorate.
[0010] In addition, when the mask is deformed due to heat, and when the mask is attached and detached, particles may be generated, and the quality of the light-emitting element may be lowered and the yield may be lowered.

Method used

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  • Light-emitting device, method for manufacturing light-emitting device, and substrate processing apparatus
  • Light-emitting device, method for manufacturing light-emitting device, and substrate processing apparatus
  • Light-emitting device, method for manufacturing light-emitting device, and substrate processing apparatus

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Embodiment 1

[0084] The method for manufacturing a light-emitting element of this embodiment is a method for manufacturing a light-emitting element in which an organic layer including a light-emitting layer is formed between a first electrode (anode electrode) and a second electrode (cathode electrode), and is characterized in that it includes : an organic layer forming step of forming the organic layer on the first electrode formed on the substrate; an electrode forming step of forming the second electrode on the organic layer; and an etching step of etching the organic layer.

[0085] That is, in this embodiment, it is characterized in that the above-mentioned patterning of the organic layer is performed by patterning by etching instead of vapor deposition using a mask. according to Figure 2A ~ Figure 2F , an example of such a method of manufacturing a light-emitting element will be described in order. In the following drawings, the same reference numerals are attached to the parts alr...

Embodiment 3

[0122] In addition, the manufacturing method of the light emitting element of this invention is not limited to this Example, As demonstrated below, various deformation|transformation and changes are possible.

Embodiment 2

[0124] Figure 3A ~ Figure 3G It is a diagram showing in order the manufacturing method of the light-emitting element of Example 2 of the present invention. In the following figures, the same reference numerals are attached to the parts that have been described previously, and description thereof will be omitted.

[0125] first, Figure 3A ~ Figure 3D The procedure shown is equivalent to that of Example 1 Figure 2A ~ Figure 2D process shown. The substrate 201, anode electrode 202, lead wire 203, organic layer 204 and cathode electrode 205 of this embodiment are respectively equivalent to the substrate 101, anode electrode 102, lead wire 103, organic layer 104 and cathode electrode 105 of Embodiment 1, and can be It is formed with the same material and the same method as described in Example 1.

[0126] In the present embodiment, the shape of the cathode electrode 205 is different from that of the first embodiment, and the area of ​​the cathode electrode 205 is small. Thu...

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Abstract

Disclosed is a substrate processing apparatus for forming a light-emitting device, wherein an organic layer containing a light-emitting layer is formed between a first electrode and a second electrode, on a substrate to be processed. This substrate processing apparatus is characterized by comprising an organic layer-forming device for forming the organic layer on the first electrode formed on the substrate to be processed, an electrode-forming device for forming the second electrode on the organic layer, and an etching device for etching the organic layer.

Description

technical field [0001] The present invention relates to a light-emitting element in which an organic light-emitting layer is formed between two electrodes and a substrate processing device for forming the light-emitting element. Background technique [0002] In recent years, instead of the CRT (Cathode Ray Tube: cathode ray tube) that has been used until now, the practical use of flat display devices that can be thin has been promoted. For example, organic electroluminescent elements (organic EL elements) have self-luminescence, High-speed response and other characteristics, so it is attracting attention as a next-generation display device. In addition, the organic EL element may be used as a surface light-emitting element in addition to being used in a display device. [0003] The organic EL element has a structure in which an organic layer including an organic EL layer (light-emitting layer) is sandwiched between an anode electrode (positive electrode) and a cathode elect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B33/10H01L51/50H05B33/26
CPCH01L51/56H01L51/0017H01L51/5012H10K71/231H10K50/11H10K71/00H01L21/31056H01L21/32136H10K71/16
Inventor 野泽俊久茂山和基大见忠弘河村忠一吉野公彦
Owner TOKYO ELECTRON LTD