Method for producing cylinder grid pitch changing grating
A technology of variable grating pitch grating and cylindrical surface, which is applied in the field of the manufacture of cylindrical variable grating pitch grating, can solve the problems of poor grating quality, difficulty in gluing, grating surface scattering, etc., achieves low cost, solves manufacturing problems, and grating efficiency high effect
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Embodiment 1
[0040] The preparation method of cylindrical variable pitch grating comprises the following steps, see figure 1 ;
[0041] Coat thickness 400nm photoresist 2 on the K9 glass substrate 1 with nanoscale precision surface by spin coating method, see figure 2 ; Expose on the designed variable pitch grating imaging optical path, and obtain a flat photoresist variable pitch grating relief pattern 3 on the photoresist through a series of holographic steps such as developing and drying. The glue has a certain thickness so that the groove structure of the grating does not touch the K9 substrate, see image 3 , the total length of the grating is 100mm, the variation range of grating line density: 800 ine / mm-14001 ine / mm.
[0042] Use an ion beam sputtering coater to plate a chromium (Cr) film with a thickness of 10 nm on the planar photoresist variable pitch grating relief pattern 3, and then plate a gold film with a thickness of 20 nm as a seed layer for electroplating nickel (Ni...
Embodiment 2
[0048] Coating a photoresist layer with a thickness of 300nm on the K9 substrate,
[0049] Holographic method to make variable pitch grating,
[0050] Ion beam sputtering plating thickness 8nm chrome film and thickness 16nm gold film,
[0051] Electroplated nickel (Ni) 50μm,
[0052]The diffraction efficiency of the nickel metal grating is sputtered with aluminum with a thickness of 120nm,
[0053] Others are with embodiment 1.
Embodiment 3
[0055] Coating photoresist with a thickness of 1200nm on the K9 substrate,
[0056] Holographic method to make variable pitch grating,
[0057] Ion beam sputtering plating thickness 9nm chromium film and thickness 18nm gold film,
[0058] Electroplated nickel (Ni) 100μm,
[0059] The nickel metal grating is sputter-coated with aluminum with a thickness of 140nm to enhance the diffraction efficiency of the grating,
[0060] Others are with embodiment 1.
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