Bearing pallet stack structure and bearing pallet
A technology of stacking structure and carrying plate, applied in the field of stacking structure, which can solve the problems of foreign particle residue and extraction
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[0034] FIG. 1 shows a perspective cross-sectional schematic view of a stacked structure of carrier discs according to an embodiment of the present invention. figure 2 A schematic top view of the carrier discs of the carrier disc stack structure in FIG. 1 is shown. Figure 3 shows the figure 2 A partially enlarged schematic diagram of the carrier plate. Please refer to Figure 1, figure 2 As shown in FIG. 3 , the susceptor stack structure 200 of this embodiment includes a plurality of susceptors 210 and an upper cover 220 . The carrying plates 210 are stacked on each other, and each carrying plate 210 has a plurality of carrying areas 211 and a plurality of depressions 212 . Each carrier tray 210 includes a carrier body 213 and a first spacer 214 . In each carrier tray 210 , the carrier areas 211 and the recesses 212 are disposed on the carrier body 213 , and each recess 212 is adjacent to at least one of the carrier areas 211 . Each carrying area 211 is for example used to ...
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