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Multi-sensor by utilizing platinum and palladium doped SO2 film and method for making same

A multi-sensor, sensor technology, applied in the direction of instruments, scientific instruments, measuring devices, etc.

Active Publication Date: 2012-05-30
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve problems such as stability in the material detection process, and propose a kind of SnO that utilizes platinum palladium doping 2 Thin film multi-sensor and its preparation method

Method used

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  • Multi-sensor by utilizing platinum and palladium doped SO2 film and method for making same
  • Multi-sensor by utilizing platinum and palladium doped SO2 film and method for making same

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Embodiment

[0023] 1. Based on thermal conductivity, electrical conductivity and process requirements, Al 2 o 3 As substrate; first polish Al 2 o 3 substrate, and then deposited photoresist, after photoetching, forming such as figure 1 Deposition baths for heating electrodes and metal measuring electrodes are shown, with a thickness of 200 nm, and then the photoresist on the substrate is stripped.

[0024] 2. Soak the substrate prepared in the previous step with acetone for 5 hours, rinse it with deionized water until it is colorless; then put it into deionized water for ultrasonic cleaning twice, each time for 10 minutes; put it into absolute ethanol for ultrasonic cleaning twice, Put it into acetone and ultrasonically clean it twice, each time for 10 minutes; finally put it in an oven for drying.

[0025] 3. Dope platinum or palladium on the pure metal Sn target of the radio frequency sputtering coating equipment, and symmetrically squeeze two (50mm×1mm×0.1mm) platinum or palladium ...

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Abstract

The invention provides a multi-sensor employing a platinum and palladium-doped SnO2 film and a preparation method thereof, and belongs to the field of the multi-sensor manufacturing. The multi-sensor comprises an Al2O3 substrate, the platinum and palladium-doped SnO2 film, heating electrodes and a metal measuring electrode; the platinum and palladium-doped SnO2 film, the heating electrodes and the metal measuring electrode are fixed on the substrate; the heating electrode are distributed around the platinum and palladium-doped SnO2 film to heat up the sensors; the metal measuring electrode is connected with the platinum and palladium doped SnO2 film for measuring externally. The multi-sensor can be applied to the SnO2 film of the air-sensitive multi-sensor, has different microstructures and different air-sensitive characteristics, can be used for preparing the air-sensitive multi-sensor for measuring mixed gas or pure gas, satisfies the requirements of a multi-sensor array for sensitive materials and is significant for design of space flight sensors of China.

Description

technical field [0001] The invention relates to a SnO doped with platinum and palladium 2 The invention relates to a film multi-sensor and a preparation method thereof, belonging to the field of multi-sensor manufacturing. Background technique [0002] With the development of the aerospace industry, the types and application ranges of flammable, explosive and toxic gases have increased. Once these gases leak during production, transportation, and use, it will cause poisoning, fire or even explosion accidents, seriously affecting the reliability of space vehicles. Due to the characteristics of such accidents as suddenness, rapid diffusion, difficulty in rescue, and wide range of hazards, timely and reliable detection of the content of certain gases in the air can prompt relevant staff or equipment to take correct measures quickly methods and effective remedial measures to avoid major property losses and casualties. These detection conditions put forward higher requirements...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/00
Inventor 张剑锋郭云高原
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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