Three dimensional structure micro zinc-nickel battery applying to microsystems and preparation method thereof

Abstract

The invention discloses a three dimensional structure micro zinc-nickel battery applying to microsystems and a preparation method thereof, which belongs to the micro battery fabrication technique field. The structure of the micro zinc-nickel battery is as follows: preparing gold combdent two dimensional plane structural current collector on the silicon substrate surface by adopting micro processing technique, preparing three dimensional stereo space structural nickel microcolumn anode and zinc microcolumn cathode on the current collector surface, depositing nickel oxide active electrode substance on the nickel microcolumn anode surface, filling and covering a layer of gel-like solid electrolyte between the anode and cathode of the three dimensional stereo space structure, and covering a layer of polyimide material on the battery surface for finishing encapsulation of the micro zinc-nickel battery. The fabrication technique based on microsystems technique is characterized of simple technique, being suitable for batch production and the like. The micro zinc-nickel battery is characterized of small volume, high storage energy, stable performance and the like, which applies widely to micro robot electronic intelligent system, chemical sensor, battlefield friend or foe identification equipment, distributed battlefield sensor and the like.

Description

technical field [0001] The invention belongs to the technical scope of manufacturing micro-batteries, and in particular relates to a three-dimensional structure micro-zinc-nickel battery applied to micro systems based on MEMS technology and a preparation method thereof. Background technique [0002] Miniaturization, miniaturization, and integration of electronic products are the general trend of technological development in the world today. Micro Electro Mechanical Systems (MEMS for short) has the characteristics of mobility, self-control, and integration, and is one of the most important technological innovations in recent years. When a subsystem can be integrated on a chip, the power supply must also complete the revolution of miniaturization and miniaturization. MEMS micro energy system refers to the integration of one or more power supply devices into a micro system with a characteristic size of micron level and a centimeter level based on MEMS technology, which can rea...

AI Technical Summary

Problems solved by technology

As the number of layers increases, the preparation process becomes more complex, the processing difficulty increases significantly, and the reliability of the prepared micro-energy devices also decreases.

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