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Evaluation method of measuring machines

A technology of measuring machines and machines, applied in the direction of measuring electricity, measuring devices, measuring electrical variables, etc., can solve problems such as inaccurate quality evaluation and inaccurate gold medal machines, and achieve the effect of improving accuracy

Inactive Publication Date: 2011-08-24
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP
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Problems solved by technology

[0004] The invention provides an evaluation method for measuring machines, which solves the problem of inaccurate quality evaluation in the prior art due to the inaccurate selection of gold medal machines

Method used

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Embodiment Construction

[0023] The evaluation method of the measuring machine of the present invention classifies the data distribution of the quality evaluation samples according to the bias and dispersion degree of the measurement values ​​of each group of semiconductor devices in the quality evaluation samples obtained by each measuring machine, and calculates the distribution of the classified data The corresponding evaluation indicators, and the measuring machine corresponding to the quality evaluation sample with at least two best evaluation indicators will be regarded as the gold medal machine.

[0024] refer to figure 1 As shown, the evaluation method of the measuring machine platform of the present invention comprises the following steps,

[0025] Step s1, for at least two measuring machines, calculating the accuracy of the measured values ​​of at least two groups of semiconductor devices obtained by each measuring machine;

[0026] Step s2, judging whether the accuracy of each group of mea...

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Abstract

An evaluation method of measuring machines comprises the following steps: with regard to at least two measuring machines, calculating the precision of at least two sets of measurements of a semiconductor device obtained by each machine; taking the at least two sets of measurements which accord to the required precision of each measuring machine as quality evaluation samples, and calculating the bias of each set of measurement of the semiconductor device in the samples; classifying the quality evaluation samples according to the bias and discrete degree of each set of measurement of the semiconductor device, and taking the bias linearity, discrete degree and degree of stability of each set of measurement of the semiconductor device as evaluation indexes; taking the measuring machine corresponding to the quality evaluation sample with at least two optimal indexes in the evaluation indexes as a gold machine.

Description

technical field [0001] The invention relates to an evaluation method of a measuring machine. Background technique [0002] Semiconductor device manufacturing processes have high quality requirements in terms of process control, equipment operation, and material fabrication. A single error can lead to the complete scrapping of a semiconductor device. In the whole process, the evaluation of the quality of the process is obtained through a large number of tests and analysis based on the test results. At present, there are various evaluation standards when analyzing test results, among which the two most important evaluation standards are bias (Bias or Accuracy) and precision (Precision). The accuracy refers to the dispersion of the measured values ​​of each semiconductor device obtained by the measuring machine. The bias refers to the difference between the average value of the measured values ​​of the semiconductor device obtained by the measuring machine and the standard v...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/26G01R31/00G01R35/00
Inventor 杨斯元简维廷
Owner SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP