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Method for detecting targets

A detection method and target material technology, which is applied in the direction of measuring devices, material analysis, and material analysis using sound waves/ultrasonic waves/infrasonic waves, etc., can solve the problems of increasing costs and not reflecting the target material welding situation well, and reduce leakage. The effect of detecting and misdetecting problems, improving objectivity and reliability

Active Publication Date: 2010-02-03
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This detection method is a destructive experiment, and damage to the product will inevitably increase the cost; moreover, this detection method has limitations, because the tensile test can only detect the tensile strength of the experimental part, which cannot reflect the overall The welding condition of the target

Method used

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  • Method for detecting targets

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Embodiment Construction

[0023] Embodiments of the present invention use ultrasonic waves to detect brazed aluminum targets. Ultrasonic inspection is a non-destructive testing. Through the analysis of ultrasonic signal characteristics, intuitive results such as defect location, size and shape of brazed connection quality can be obtained.

[0024] figure 1 It is the basic flow chart of the detection method of the target material according to the embodiment of the present invention, and the method includes:

[0025] Step S11, providing a brazed target material, the target material being aluminum or an aluminum alloy;

[0026] In step S12, ultrasonic detection is performed on the target material, wherein the frequency of the ultrasonic waves is 5-15 MHz.

[0027] Sound waves with a frequency higher than 20000Hz are called "ultrasonic waves". Ultrasonic waves have the characteristics of good directionality, strong penetrating ability, easy to obtain concentrated sound energy, and long distance in water. ...

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Abstract

The invention relates to a method for detecting targets, comprising the following steps: providing soldered targets, wherein the targets are aluminum or aluminum alloy; and performing ultrasonic detection to the targets, wherein the ultrasonic frequency ranges from 5 MHz to 15 MHz. The method for detecting targets does not need to destroy targets and can improve the objectivity and the reliabilityfor detecting the welding quality.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a detection method of a target material. Background technique [0002] Generally, the fabrication of the target involves combining a target with sputtering properties and a backing plate having a certain strength. The backing plate can play a supporting role when the target assembly is assembled to the sputtering base, and has the function of conducting heat. During the sputtering process, due to the harsh working environment of the target material, if the bonding between the target material and the backing plate is poor, the target material will deform, crack, and fall off from the combined backing plate under heat conditions. As a result, the sputtering cannot achieve the uniform effect of sputtering, and may also cause damage to the sputtering base. [0003] Selecting an effective welding method can reliably combine the target and the backing plate. Generally, for...

Claims

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Application Information

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IPC IPC(8): G01N29/04G01N29/265G01B17/00G01B17/06
Inventor 姚力军潘杰王学泽周友平陈勇军刘庆
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD