Cardinal plate transporting equipment

A technology for substrates and equipment, applied in the field of substrate transportation equipment, can solve the problems such as the inability to form air layers, and achieve the effect of easy removal and suppression of dust pollution

Inactive Publication Date: 2010-03-17
DAIFUKU CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the conventional substrate conveying equipment, the air jetting body for floating is a device that jets air toward the horizontal direction from the jet port formed at the upstream end of the substrate taking-out direction. The air layer formed by the ejection of air cannot be formed on the downstream side of the above-mentioned ejection port in the direction of taking out the substrate.
And, in order to eject air toward the horizontal direction from the above-mentioned ejection port, it is necessary to form an air guide such as a nozzle with a certain length along the substrate taking-out direction, so there is no floating air ejection body in the area where the air layer is formed. The length of the take-out direction is the length of a certain degree

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0287] > Rotating Body Support Type

[0288] Hereinafter, another Embodiment 1 will be described with reference to the drawings.

[0289] Such as Figure 20 As shown, the substrate conveying device is provided with: a container conveying mechanism 111 for conveying the container 2 for the container; and a substrate relay unit 70 for transferring the substrate 1 relative to the container 2 conveyed by the container conveying mechanism 111 .

[0290] Furthermore, the substrate relay unit 70 is configured to take out the substrate 1 from the storage container 2 conveyed by the container conveyance mechanism 111 and store the substrate 1 in the storage container 2, and is configured to transfer the substrate 1 from the storage container 2. 1 and storage of the substrate 1 in the storage container 2.

[0291] [storage container]

[0292] Such as Figure 20 and Figure 21 As shown, the storage container 2 is configured to include: a container body 41 formed in a cylindrical sha...

Embodiment approach 2

[0348] > Plate-shaped body support type

[0349] Hereinafter, another embodiment 2 will be described with reference to the drawings.

[0350] In addition, another embodiment 2 has the same structure as another embodiment 1 except that the structure of the supported portion 119 is different, so the same reference numerals are assigned to the same components as another embodiment 1, and explanations are omitted. Another configuration of Embodiment 1.

[0351] Such as Figure 27 As shown, on the lid member 42 , supported portions 119 are provided in a state in which they protrude from the lid body 116 outward in the width direction and the container body side on both sides in the width direction of the upper end portion of the lid body 116 .

[0352] The supported portion 119 is formed of a plate-shaped body 126 whose lower surface is formed as a horizontal flat surface along the arrangement direction. In addition, the engaged portion 115 is supported in a state protruding dow...

Embodiment approach 3

[0355] "Another Embodiment 3" Pressure Cylinder Support Type

[0356] Hereinafter, another embodiment 3 will be described with reference to the drawings.

[0357] In addition, another embodiment 3 has the same configuration as another embodiment 1 except that the configurations of the engaging portion 114, the supported portion 119, and the cover detachment mechanism 122 are different, so regarding the same configuration as another embodiment 1, The description will be omitted by assigning the same reference numerals, and the configuration different from the first embodiment will be mainly described.

[0358] Such as Figure 28 As shown, the cover member 42 is provided with an engaged portion 115 that engages with the engaging portion 114 located at the upper end portion of one end of the container main body 41 from the obliquely upper side of the cover member side in the arrangement direction. are engaged and supported on the engaging portion 114. That is, the lid member 4...

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PUM

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Abstract

The invention provides a cardinal plate transporting equipment that cardinal plate of an object to be taken out has no touch with an air extrusive body for floating, which comprises the following components: an air extrusive body (71) for floating, which is set on position adjoining to end of downstream side of a fulcrum table in cardinal plate taking out direction; spurt out air between a lower surface of a cardinal plate (1) of the object to be taken out and an upper surface of the fulcrum table (45) to support the cardinal plate (1); and an auxiliary air spurt out body (71), spurt out air between an upper surface of an air spurt out body (71) for floating and a lower surface of the cardinal plate (1) of the object that taken out by a taking out mechanism.

Description

technical field [0001] The present invention relates to a substrate conveying device, which is provided with: a storage container, a plurality of support plates for mounting and supporting a rectangular substrate are arranged in a state spaced apart in the vertical direction; and an air jetting body for floating is provided. At the container adjacent position adjacent to the downstream side end portion of the support plate in the substrate extraction direction of the plurality of support plates that supports the substrate to be taken out from the storage container, the lower surface of the substrate to be taken out and the substrate to be taken out Air is sprayed between the upper surfaces of the above-mentioned support plate on which the substrate is placed and supported; The above-mentioned floating air jetting body is taken out from the above-mentioned storage container. Background technique [0002] The above-mentioned substrate conveying equipment is that a plurality o...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/673H01L21/683B65G1/04B65G49/06B65D85/48B25J15/00
CPCB65G47/911B65G49/061B65G49/065G02F1/1303H01L21/67784
Inventor 池畑淑照
Owner DAIFUKU CO LTD
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