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Test structure for self-excitation mechanism of microelectronic mechanical switch and preparation method thereof

A technology of microelectronic machinery and test structure, which is applied in the direction of circuit breaker test, circuit, electrical components, etc., and can solve the problem that the switch self-excitation mechanism test structure has not been specially designed.

Inactive Publication Date: 2011-11-23
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the method of verifying the self-excitation mechanism of MEMS switches is to test ordinary switches through related instruments and equipment, but there is no special design for the test structure of the self-excitation mechanism of the switch.

Method used

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  • Test structure for self-excitation mechanism of microelectronic mechanical switch and preparation method thereof
  • Test structure for self-excitation mechanism of microelectronic mechanical switch and preparation method thereof
  • Test structure for self-excitation mechanism of microelectronic mechanical switch and preparation method thereof

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Embodiment Construction

[0035] The specific implementation scheme of the test structure of the MEMS self-excitation mechanism of the invention is as follows:

[0036] Set on the substrate 1: CPW a, 1 / 4 power splitter b, beam array c:

[0037] The CPW a is composed of the signal line 3 and the ground line 4 of the CPW.

[0038]The 1-to-4 power splitter b consists of three 1-to-2 Wilkinson power splitters forming an RF input port 5 and four RF output ports 6,7,8,9. The one-to-two Wilkinson power divider is connected by CPW and two ACPSs, and the isolation resistor is a tantalum nitride film resistor 2.

[0039] The beam structure array c is composed of a single beam structure and four beam structures respectively connected to the four RF output ports 6, 7, 8, 9 of the one-to-four power divider b. The beam structure can be a fixed beam 13 or a cantilever beam 14 . The anchor beam 13 spans the CPW a, and the two anchor areas 15 are respectively located on the two ground wires 4 of the CPW. The CPW si...

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Abstract

The invention discloses a test structure for a self-excitation mechanism of a microelectronic mechanical switch, which has the characteristics of accurate test result, strong comparability, simple requirement on testers, and the like. In the test structure, gallium arsenide is used as a substrate and the substrate is provided with a CPW, a four-way power divider and a beam array. The test structure is provided with five same beam structures, wherein one of the beam structures is directly connected with an RF input port and an RF output port, the other four beam structures are connected with four output ports of the four-way power divider respectively, and the other ends of the other four beam structures are connected with the RF output port respectively. The five beam structures are provided with an independent driving electrode respectively. In the mechanical structure, the CPW (a), the four-way power divider (b) and the beam array (c) are arranged on the same substrate (1).

Description

technical field [0001] The invention provides a test structure and a preparation method of the self-excitation mechanism of a micro-electro-mechanical switch, belonging to the technical field of micro-electro-mechanical systems. Background technique [0002] Microelectromechanical switches have the advantages of high isolation, low insertion loss, and high linearity. However, due to the existence of the self-excitation mechanism, the power handling capability of MEMS switches is small compared with conventional semiconductor switches, generally not more than a few watts. Therefore, in the application process of MEMS switches, it is necessary to carry out theoretical analysis and experimental verification of the self-excitation mechanism. At present, the method for verifying the self-excitation mechanism of MEMS switches is to test ordinary switches through related instruments and equipment, but there is no special design for the test structure of the self-excitation mechani...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/327H01P5/12
Inventor 廖小平肖建斌
Owner SOUTHEAST UNIV
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