Thin film deposition apparatus

Abstract

A thin film deposition apparatus that can be simply applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield includes: a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; a barrier wall assembly including a plurality of barrier walls that are arranged in the first direction in order to partition a space between the first nozzle and the second nozzle; and an alignment member including an interval control member that adjusts an interval between the second nozzle and the substrate, and / or an alignment control member that adjusts alignment between the second nozzle and the substrate.

Description

[0001] This application claims No. 10-2009-0045199 filed with the Korean Intellectual Property Office on May 22, 2009, No. 10-2009-0074001 filed with the Korean Intellectual Property Office on August 11, 2009, and Benefit of Korean Patent Application No. 10-2010-0014272 filed with the Korean Intellectual Property Office on February 17, the disclosures of which are hereby incorporated by reference in their entirety. technical field [0002] The present invention relates to a thin film deposition device, and more particularly, the present invention relates to a thin film deposition device that can be easily used in mass production of large-size display devices and has improved manufacturing yield. Background technique [0003] Compared with other display devices, organic light-emitting display devices have a large viewing angle, good contrast characteristics, and fast response speed, so organic light-emitting display devices are attracting attention as next-generation display d...

AI Technical Summary

Problems solved by technology

However, this structure is difficult to achieve high luminous efficiency, therefore, an intermediate layer including an electron injection layer, an electron transport layer, a hole transport layer, a hole injection layer, etc. is optionally additionally provided between the emission layer and each electrode.

[0005] In addition, it is actually difficult to form fine patterns in organic thin films such as emission layers and interlayers, and red luminous efficiency, green luminous efficiency, and blue luminous efficiency vary depending on the organic thin film

For this reason, it is not easy to form an organic thin film pattern on a large substrate such as a 5G or larger-sized mother glass by utilizing a conventional thin film deposition device, so it is difficult to manufacture driving voltage, current density, brightness, color purity, luminous efficiency, Large-scale organic light-emitting display device with satisfactory lifetime characteristics

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