Unlock instant, AI-driven research and patent intelligence for your innovation.

Piezoelectric element and method for producing the same, piezoelectric actuator and liquid ejecting head and device

A piezoelectric actuator, piezoelectric element technology, applied in piezoelectric device/electrostrictive device, fabrication/assembly of piezoelectric/electrostrictive device, material selection for piezoelectric device or electrostrictive device It can solve the problems of electrode cracking and insufficient moisture barrier performance.

Inactive Publication Date: 2011-03-30
SEIKO EPSON CORP
View PDF5 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If stress remains in the electrode, cracks or the like may occur in the electrode in the region where the residual stress is concentrated, and the moisture barrier performance becomes insufficient.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Piezoelectric element and method for producing the same, piezoelectric actuator and liquid ejecting head and device
  • Piezoelectric element and method for producing the same, piezoelectric actuator and liquid ejecting head and device
  • Piezoelectric element and method for producing the same, piezoelectric actuator and liquid ejecting head and device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0081] Preferred embodiments of the present invention will be described below with reference to the drawings. Furthermore, the following embodiments describe an example of the present invention. In addition, this invention is not limited to the following embodiment, Various modification examples implemented in the range which does not change the summary are included.

[0082] 1. Piezoelectric element

[0083] figure 1 It is a schematic diagram of the cross section of the piezoelectric element 100 of this embodiment. figure 2 is a schematic cross-sectional view of the main part of the piezoelectric element 100 .

[0084] The piezoelectric element 100 of this embodiment includes a substrate 10 , a first conductive layer 20 , a piezoelectric layer 30 , a buffer layer 40 , and a second conductive layer 50 .

[0085] The substrate 10 can be formed as a flat plate made of, for example, a conductor, a semiconductor, or an insulator. The substrate 10 may be a single layer or a m...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides a piezoelectric element and a method for producing the same, a piezoelectric actuator and a liquid ejecting head and a device with high reliability. A piezoelectric element includes a substrate (10); a first conductive layer (20) disposed on or above the substrate; a piezoelectric layer (30) covering a top and a side of the first conductive layer; a relaxing layer (40) disposed on or above the piezoelectric layer and along an edge of a top surface of the piezoelectric layer; and a second conductive layer (50) covering at least the relaxing layer and the piezoelectric layer.

Description

technical field [0001] The present invention relates to a piezoelectric element, a piezoelectric actuator, a liquid ejection head, a liquid ejection device, and a method of manufacturing the piezoelectric element. Background technique [0002] The piezoelectric element includes a structure in which a piezoelectric body is sandwiched between two electrodes. Since the piezoelectric element has such a structure, it is possible to apply an electric field to the piezoelectric body to cause deformation such as expansion and contraction. As a typical material of the piezoelectric body, lead zirconate titanate and the like are known. [0003] Piezoelectric elements can also be applied to piezoelectric actuators such as liquid ejection heads. The performance of piezoelectric elements sometimes deteriorates due to deterioration of the piezoelectric body. It is known that when the piezoelectric material is an oxide such as lead zirconate titanate, if moisture comes into contact with...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/047H01L41/22B41J2/14B41J2/045B41J2/055B41J2/135H01L41/09H01L41/18H01L41/187H01L41/29
CPCB41J2/14201B41J2/14233H01L41/0973B41J2/161B41J2/1631B41J2/1634B41J2/1628H01L41/0475H01L41/0805B41J2/1646H01L41/27H01L41/0478H01L41/332Y10T29/42H10N30/1051H10N30/2047H10N30/082H10N30/875H10N30/05H10N30/878
Inventor 中山雅夫
Owner SEIKO EPSON CORP