One-step manufacture method of micro-flow diagnosis chip
A chip and microfluidic technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve problems such as complex procedures, achieve wide application prospects, short preparation time, and small non-specific adsorption effects
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[0026] Example 1: One-step preparation of human IgG microfluidic diagnostic chip
[0027] (1) Preparation of photoresist template
[0028] Firstly, SU-8-100 negative photoresist (Micro Chem, USA) was used to spin the glue on a single-sided polished silicon wafer at a speed of 2500r / min to obtain a photoresist with a thickness of 80 μm. The pre-baking condition is to rise from room temperature to 65°C for 10 minutes, hold for 10 minutes, then rise to 95°C for 30 minutes, hold for 35 minutes, and cool in the furnace. Exposure was carried out using a MA6 lithography machine from German Karl Suss Company, and the exposure time was 60s. The post-baking condition is to rise from room temperature to 90°C for 30 minutes, keep the temperature for 10 minutes, and cool in the furnace. Micro Chem's special SU-8 developer was used, and the development time was 6 minutes. After development, it was cleaned with isopropanol, and dried with nitrogen gas to obtain the required photoresist tem...
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