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Adjustable pressure device used for polishing heavy-calibre plane optical element

A technology of optical components and pressure devices, applied in the field of pressure devices, can solve problems such as low processing efficiency, uncontrollability and uncertainty, and achieve the effects of improving processing efficiency, increasing external pressure, and flexible installation

Inactive Publication Date: 2012-04-04
XIAMEN UNIV
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for adjusting the pressure on the polishing surface of the workpiece during processing, which can not only improve The polishing quality of the workpiece and the control of material removal rate, and a simple and practical adjustable pressure device for polishing large-aperture flat optical components

Method used

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  • Adjustable pressure device used for polishing heavy-calibre plane optical element
  • Adjustable pressure device used for polishing heavy-calibre plane optical element
  • Adjustable pressure device used for polishing heavy-calibre plane optical element

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Embodiment Construction

[0019] The technical scheme of the present invention will be further described below in conjunction with the drawings.

[0020] See figure 1 , The workpiece 2 is placed on the polishing disk 4 with a polishing pad 3, and the polishing is performed by the rotation of the polishing disk 4 and the rotation of the workpiece 2. The adjustable pressure device is fixed at the corresponding position on the upper surface of the workpiece 5 (see figure 2 ), according to the surface topography of the workpiece 2, the weight of the mass 11 of the pressure device can be increased on the convex surface of the workpiece 2, thereby increasing the local pressure, and finally increasing the local material removal rate, and improving the polishing accuracy. By simultaneously increasing the weight of the mass block 11 on all the pressure devices, the material removal rate of the workpiece 2 as a whole can be increased, thereby improving the polishing efficiency.

[0021] See image 3 , The clamp plat...

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Abstract

The invention provides an adjustable pressure device used for polishing a heavy-calibre plane optical element, relating to a pressure device. The adjustable pressure device used for polishing the heavy-calibre plane optical element, provided by the invention, is used for regulating the pressure intensity born by a polishing surface of a workpiece when being processed, is capable of improving the polishing quality of the workpiece and controlling the removal rate of materials, and has simple and practical structure. The adjustable pressure device is provided with a mass block and a fixture flat plate, wherein the mass block is used as a pressure source; the fixture flat plate is provided with a fulcrum bar, a base and an adsorption base film, the fulcrum bar is used for loading the mass block, the lower part of the base is connected with the adsorption base film, a base body and a film are arranged on the adsorption base film, the base is adsorbed on the surface of the workpiece through the film of the adsorption base film to ensure that the whole device is fixed on the corresponding part of the workpiece.

Description

Technical field [0001] The invention relates to a pressure device, in particular to an adjustable pressure device for polishing large-caliber flat optical elements. Background technique [0002] With the continuous development of modern science and technology, there is an increasing demand for ultra-precision surfaces. The so-called high-precision surface usually refers to a surface with a precision of 0.3 to 0.03 μm. The corresponding processing technology is called high-precision surface processing technology. Nowadays, many large-scale systems require a large number of large-aperture and high-precision flat optical components, which require such technology for processing. In the processing of large-aperture and high-precision flat optical components, polishing is a very important technology, but it still has some problems at present: it depends too much on the experience of the operator, the processing efficiency is not high, and the processing quality is also unstable. How t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B13/00
Inventor 郭隐彪姜晨杨炜唐旎潘日
Owner XIAMEN UNIV
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