Inspection apparatus for appearance of workpiece and inspection method thereof
A technology for visual inspection devices and workpieces, which is applied to conveyor objects, transportation and packaging, etc., can solve the problems of decreased camera accuracy, decreased electrostatic adsorption force, influence, etc., and achieves the effect of improving camera accuracy and processing capacity.
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no. 1 approach
[0063] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figure 1 to Figure 9 It is a figure which shows the 1st Embodiment of the appearance inspection apparatus of the workpiece|work of this invention, and the appearance inspection method of a workpiece.
[0064] First, use figure 2 , the workpiece inspected by the workpiece appearance inspection device will be described.
[0065] exist figure 2 Among them, the workpiece W composed of chip components such as capacitors and resistors has a hexahedron shape, has a main body Wd made of an insulator, and electrodes Wa and Wb made of conductors formed at both ends in the longitudinal direction of the main body Wd. In the case of visually inspecting the workpiece W, the workpiece W is placed on the transfer table 2 described later, and the transfer table 2 is figure 2 Rotate in the direction of the arrow Z to transport the workpiece W. Then, the side surface on the opposite...
no. 2 approach
[0115] Next, use Figure 10 to Figure 15 , the second embodiment of the present invention will be described.
[0116] Figure 10 to Figure 15 The shown second embodiment of the present invention differs from the first embodiment only in that a conductive plate (conductor) 15 is arranged below the transfer table 2 instead of arranging the charging unit 6A below the transfer table 2 , other structures with Figure 1 to Figure 9 The first embodiment shown is substantially the same.
[0117] exist Figure 10 to Figure 15 The second embodiment shown, with Figure 1 to Figure 9 The parts that are the same as those in the first embodiment shown are given the same symbols, and detailed descriptions will be omitted.
[0118] here, Figure 10 is viewed from the direction of the arrow Y figure 1 The perspective view seen in the region S enclosed by the dashed line in , corresponding to Figure 4 . exist Figure 10 Among them, on the lower side of the transfer table 2, a conduct...
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