Unlock instant, AI-driven research and patent intelligence for your innovation.

Hydroformed fluid channels

A channel and fluid technology, applied in the direction of manufacturing tools, other household appliances, welding/welding/cutting items, etc., can solve the problem of low heat transfer efficiency

Inactive Publication Date: 2011-10-05
APPLIED MATERIALS INC
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is also labor intensive and the heat transfer is less efficient because most of the tubing is not in direct contact with the chamber walls

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Hydroformed fluid channels
  • Hydroformed fluid channels
  • Hydroformed fluid channels

Examples

Experimental program
Comparison scheme
Effect test

example

[0054] According to the embodiments described herein, a fluidic channel 5 is formed on a semiconductor substrate processing chamber. The first component was a flat or planar sidewall of the chamber and was grade 304 stainless steel with a thickness of approximately 0.25 inches (6.35 mm). The second component is a piece of stainless steel of grade 304 having a thickness of 0.029 inches (0.736 mm). An orifice plane with a depth of approximately 0.030 inches (0.762 mm) was formed in the first part and holes for the inlet and outlet fittings were formed in the second part. Although both the first and second parts are generally planar, the second part is brought into contact with the first part and the perimeter of the second part is tack welded to the first part.

[0055] Successive welds are placed in a desired pattern to join the first and second components. The X / Y table is used to move the first part and the second part to place continuous welds. The first fluid channeling ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A method and apparatus for providing a fluid channel on a surface that is subject to extreme temperatures is described. The embodiments described herein provide a fluid channel wherein the surface that is subject to the extreme temperatures forms one side of the fluid channel.

Description

technical field [0001] Embodiments of the invention relate to a method and apparatus for forming channels on a chamber operable to flow a heat transfer fluid. Background technique [0002] Portions of the chamber that are subjected to extreme temperature processing often need to be conditioned and maintained within a specific temperature range. In one example, a chamber used for high temperature processing may need to be cooled to a lower temperature. Typically, the chamber will comprise at least one wall and the heat transfer fluid flows inside or adjacent to the chamber wall to remove excess heat. There are various conventional methods of forming conduits for flowing heat transfer fluids. One method involves creating channels in the lumen wall by gun drilling, which is labor intensive and expensive. Another method involves coupling the tubing to the lumen wall by clamps or welding. This method is also labor intensive and the heat transfer efficiency of this method is l...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B21D26/021B21D26/029B23K31/02
CPCB23K31/02B23K2203/04B21D26/021B23K2203/10B21D26/029B23K2201/14B23K2101/14B23K2103/04B23K2103/05B23K2103/10Y10T29/49375Y10T29/49371B21D26/02
Inventor J·D·菲尔奇A·韦斯希M·P·卡拉兹姆
Owner APPLIED MATERIALS INC