Flaw detecting system and method

Abstract

The invention discloses a flaw detecting system for detecting a crystal silicon product and a method for detecting the crystal silicon product. The method comprises the steps of: slightly vibrating a fixed crystal silicon product by a microvibration exciter, so that the crystal silicon product generates an exciting signal; capturing the exciting signal by a capturing device, so that an analyzing detector is used for analyzing the exciting signal captured by the capturing device by a special analysis method in a time frequency way to obtain an analysis result; and detecting the flaw state of the crystal silicon product according to the analysis result.

Description

technical field [0001] The present invention relates to a defect detection system and method, more specifically, to a defect detection system and method for detecting fragmentation defects of crystal silicon products by using time-frequency analysis method. Background technique [0002] In the manufacturing process inspection process of crystalline silicon products such as solar panels, the most important thing is to quickly and correctly detect products with fragmentation defects and eliminate them, so as to maintain the yield and reliability of products. Chipping defects are divided into external chipping defects that can be recognized by the naked eye and internal chipping defects that cannot be recognized by the naked eye. The focus of the inspection process is often how to detect products with internal chipping defects in real time. [0003] As disclosed in China Taiwan Publication Patent No. M350015, it is a photoelectric element detection device, which can detect phot...

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Problems solved by technology

However, the detection technology disclosed in the above-mentioned background technology excites the acoustic wave signal by directly hitting the substrate to be tested, which often causes damage to the substrate to be tested due to factors such as improper operation.

Furthermore, the above detection method must also be matched with a database with pre-stored spectrograms of standard acoustic signals, which will also increase the burden on users

In addition, since the above detection method only analyzes the spectrogram of the acoustic signal in the frequency domain, it still cannot provide detection results with high accuracy.

[0005] As for the detection technology disclosed in U.S. Publication No. 4,603,584, because it is still limited to the analysis of the spectrogram of the acoustic signal in the frequency domain, it still cannot provide detection results with high accuracy.

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