Interference filter, optical module, and analysis device

A technology of interference filter and silver alloy film, applied in the field of interference filter, can solve the problems of decreased reflectivity of Ag film, decreased performance of interference filter, unable to give full play to the lens, etc. Reliable and effective for suppressing the decrease in reflectance

Inactive Publication Date: 2012-03-14
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

After this treatment, the reflectivity of the Ag film decreases greatly, so that the functions required by the lens cannot be fully exerted, resulting in a decrease in the performance of the interference filter
In addition, the decrease in reflectivity of the Ag film over time is also large.

Method used

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  • Interference filter, optical module, and analysis device
  • Interference filter, optical module, and analysis device
  • Interference filter, optical module, and analysis device

Examples

Experimental program
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no. 1 approach

[0048] 1. The overall structure of the color measurement device

[0049] figure 1 It is a figure which shows the schematic structure of the color measurement apparatus of embodiment concerning this invention.

[0050] The color measurement device 1 is the analysis device of the present invention, such as figure 1 As shown, it includes a light source device 2 that emits light to an object A to be inspected, a color measurement sensor 3 as the optical module of the present invention, and a control device 4 that controls the overall operation of the color measurement device 1. Moreover, the color measurement device 1 is a device that reflects the light emitted from the light source device 2 on the inspection object A, and receives the reflected inspection object light in the color measurement sensor 3, and is based on the output from the color measurement sensor 3. The detection signal is used to analyze and measure the chromaticity of the inspection target light, that is, the color o...

no. 2 approach

[0139] Next, a second embodiment according to the present invention will be described.

[0140] Here, in order to omit or simplify the description, the same components in the description of the second embodiment as those of the first embodiment are marked with the same reference numerals.

[0141] In the second embodiment, the fixed lens 56 and the movable lens 57 of the etalon 5A include dielectric films 563, 573, pure silver films 561, 571, and silver alloy films 562, 572, which are similar to the standard of the first embodiment. With 5 different. The silver alloy films 562 and 572 are the Ag-Sm-Cu alloy film, Ag-Bi-Nd alloy film, Ag-Au alloy film, Ag-Cu alloy film, Ag-Au-Cu alloy film, Ag-Si-Cu alloy film, Ag-P-Cu alloy film, Ag-P-In-Cu alloy film, Ag-Te-Cu alloy film, Ag-Ga-Cu alloy film, Ag-In-Sn alloy film Any kind.

[0142] Such as Figure 4 As shown, on the first substrate 51, a dielectric film 563, a pure silver film 561, and a silver alloy film 562 are sequentially prov...

no. 3 approach

[0148] Next, a third embodiment of the present invention will be described.

[0149] Here, in order to omit or simplify the description, the same reference numerals are used to denote the same structural elements in the description of the third embodiment as those of the first embodiment and the second embodiment.

[0150] In the third embodiment, the fixed lens 56 and the movable lens 57 of the etalon 5B include the protective films 564 and 574 in addition to the dielectric films 563 and 573, the pure silver films 561 and 571, and the silver alloy films 562 and 572. In one point, it is different from the etalon 5 of the first embodiment and the etalon 5A of the second embodiment. The silver alloy films 562 and 572 are the Ag-Sm-Cu alloy film, Ag-Bi-Nd alloy film, Ag-Au alloy film, Ag-Cu alloy film, Ag-Au-Cu alloy film, Ag-Si-Cu alloy film, Ag-P-Cu alloy film, Ag-P-In-Cu alloy film, Ag-Te-Cu alloy film, Ag-Ga-Cu alloy film, Ag-In-Sn alloy film Any kind. The dielectric films 563 ...

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Abstract

The invention provides an interference filter, an optical module, and an analysis device. The interference filter includes two reflective films that are opposed to each other with a gap interposed therebetween and substrates that support the corresponding reflective films. The reflective films each include a pure silver film and a silver alloy film. The pure silver film and the silver alloy film are formed on the corresponding substrate sequentially from the substrate. The silver alloy film is one of an Ag-Sm-Cu alloy film containing silver (Ag), samarium (Sm), and copper (Cu) and an Ag-Bi-Nd alloy film containing silver (Ag), bismuth (Bi), and neodymium (Nd).

Description

Technical field [0001] The invention relates to an interference filter, an optical module having the interference filter, and an analysis device having the optical module. Background technique [0002] Conventionally, there has been known an interference filter in which a mirror as a reflective film is arranged opposite to each other on the surfaces of a pair of substrates facing each other. Such an interference filter includes a pair of substrates kept parallel to each other, and a pair of mirrors (reflection films) formed on the pair of substrates so as to face each other and have a gap at a fixed interval. [0003] In such an interference filter, by reflecting light between a pair of lenses and transmitting only light of a specific wavelength, interference is used to cancel light of other wavelengths, so that only light of a specific wavelength can be transmitted through incident light. [0004] Use a dielectric film or a metal film as the lens. The required functions of the len...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28G01N21/25
CPCG01J3/26G01J3/51G01N21/251G01N21/255G02B5/28
Inventor 北原浩司新东晋
Owner SEIKO EPSON CORP
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