Sample set for transmission electron microscope tests and fabrication method thereof

Abstract

The invention discloses a sample set for transmission electron microscope (TEM) tests. The sample set consists of a layered marking part and at least two samples, which are stuck together, the stuck surface of each sample in the sample set is the non-tested surface of the sample, and moreover, the tested surface of each sample is exposed on the transmission electron microscope-tested surface of the sample set; the layered marking part is positioned between the non-tested surfaces of the two samples in the sample set, and the two opposite surfaces of the layered marking part are respectively stuck on the non-tested surfaces of the two samples to mark the arrangement direction of each sample; or only one surface of the layered marking part is stuck on the non-tested surface positioned on the front end or the tail end of the sample set to mark the front end or the tail end of the sample set. Compared with the conventional TEM-tested sample set, the sample set can conveniently differentiate a plurality of samples with the same or like pattern when in use, so that the overall efficiency of a TEM test can be increased. The sample set can be widely applied in the present IC (intelligent circuit) technology.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a sample group for TEM (Transmission Electron Microscope, transmission electron microscope) detection and a manufacturing method thereof. Background technique [0002] In the semiconductor manufacturing industry, there are various detection equipment, such as TEM, SEM, etc., among which TEM is an important tool suitable for detecting the morphology, size and characteristics of the thin films that make up the device. Its working principle is to thin the sample to be detected to about 0.1 μm by cutting, grinding, ion thinning, etc., and then put it into the TEM sample chamber, irradiate the sample with a high-voltage accelerated electron beam, and enlarge the sample shape and project it on the screen. on, photographed, and then analyzed by TEM data later. One of the outstanding advantages of TEM is that it has high resolution and can observe the shape and size of extremely thin films...

AI Technical Summary

Problems solved by technology

[0009] In order to effectively solve the problem of low TEM detection efficiency of multiple samples with similar patterns, the present invention proposes a sample set for transmission electron microscope detection, which is characterized in that the sample set includes layered An identification piece and at least two samples, the bonded surface of each sample in the sample group is the non-detection surface of the sample, and the detection surface of each sample is exposed to the sample group for detection by the transmission electron microscope surface for use; wherein, the layered marker is located between the non-detection surfaces of the two samples in the sample group, and is bonded to the non-detection surfaces of the two samples with the opposite surfaces respectively , to identify the arrangement direction of each sample; or only one surface of the layered marker is bonded to the non-detecting surface located at the head end or tail end of the sample group, so as to identify the head end or tail end of the sample group

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