Vacuum film forming apparatus and method for detecting position of shutter plate of vacuum film forming apparatus

Abstract

At the time of detecting a position of a shutter plate, a laser light, for instance, is radiated from a detector (an optical sensor). The radiated laser light reaches the shutter plate through a window of a chamber. Then, the laser light is reflected by the surface of the shutter plate and re-enters the detector. The detector detects the time required from the emission of the laser light to the entry of the reflected light.

Description

technical field [0001] The present invention relates to a vacuum film forming apparatus and a method for detecting a position of a shutter of the vacuum film forming apparatus. Specifically, it relates to a technique for detecting displacement of a holding position of a shutter with high accuracy. Background technique [0002] For example, in a vacuum film-forming device that forms a thin film on the film-forming surface of a substrate, in order to clean the surface of the target as a film-forming material and stabilize the film-forming characteristics, film-forming (sputtering) is performed on the substrate of the film-forming target. ) before the formal process, film formation (false sputtering) is generally performed on a dummy substrate (hereinafter also referred to as a barrier) (for example, refer to Patent Document 1). [0003] When performing such pseudo-sputtering, sputtering is performed with a baffle placed on a table on which an object to be filmed is placed. Wh...

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Problems solved by technology

[0005] However, if the shutter is held by the arm in a state where it is shifted from a preset holding reference position, when placed on the table, a part of the table may protrude from the shutter and be exposed.

If a part of the stage protrudes from the shutter, the exposed part of the stage may be formed into a film when dummy sputtering is performed, and the formed film may scatter, which becomes a problem when forming a film on a target substrate. Problems such as impurities

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