Sealing method of degassing tube
A degassing tube and argon flow technology, which is applied in the field of semiconductor manufacturing, can solve the problems of gaps, the vacuum degree of the vacuum envelope cannot be maintained, and air leakage, etc., and achieves the effect of simple process, convenient operation, and enhanced sealing effect.
Active Publication Date: 2015-01-21
KONFOONG MATERIALS INTERNATIONAL CO LTD
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Problems solved by technology
[0006] The technical problem solved by the present invention is to provide a degassing tube sealing method to solve the technical problems that the vacuum degree in the vacuum bag cannot be maintained and that gaps and air leakage occur during the subsequent bag cooling, storage and transportation.
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Embodiment Construction
[0026] The invention provides a method for sealing a degassing tube, specifically as figure 1 As shown, to solve the technical problems that the vacuum degree in the vacuum bag cannot be maintained and the gap and air leakage appear in the subsequent bag cooling, storage and transportation process, and has the advantages of simple process, convenient operation and good sealing effect.
[0027] The sealing method of described degassing pipe comprises:
[0028] Step S11, providing a degassing tube, one end of the degassing tube is connected to a vacuum device, and the other end is connected to a vacuum bag.
[0029] Step S12, disconnect the degassing tube from the vacuum equipment.
[0030] Step S13, cooling the vacuum equipment end of the degassing pipe.
[0031] Step S14, performing flattening treatment on the end of the vacuum equipment after the cooling treatment to form a flattened area.
[0032] Step S15, performing truncation processing on the crushed area.
[0033] I...
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Abstract
The invention provides a sealing method of a degassing tube. The sealing method comprises the steps that a first end of the degassing tube is connected with vacuum equipment, and a second end of the degassing tube is connected with a vacuum sheath; after the degassing tube is vacuumized in a heating environment, the sealing method is executed; the first end of the degassing tube is separated from the vacuum equipment and cooled; the cooled first end of the degassing tube is flattened, so as to form a flattened area; and the flattened area is cut off. The sealing method of the degassing tube, which is provided by the invention, can solve the technical problems that the vacuum degree in the vacuum sheath cannot be maintained, gaps and gas leakage phenomena occur in the follow-up sheath cooling, storage and transportation process, and the like, has the advantages of simple process and good sealing effect, and is convenient to operate.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a sealing method for a degassing tube used in vacuum treatment during the manufacturing process of a sputtering target. Background technique [0002] Large scale integrated circuits use sputtering targets for vacuum sputtering. When the sputtering target is made by powder metallurgy, the powder is prone to oxidation during isostatic pressing, so the powder needs to be put into the package, after degassing treatment, then the package is sealed, and then put into the isostatic pressing furnace Densification is carried out in the middle; when the sputtering target and the back plate are diffused and welded, it is also necessary to make a corresponding sheath to prevent oxidation, after degassing treatment, then seal the sheath, and then put it into an isostatic furnace for welding . [0003] The above-mentioned degassing treatment is to put powder or metal block (the met...
Claims
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IPC IPC(8): B23P15/00
Inventor 姚力军相原俊夫大岩一彦潘杰王学泽袁海军
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD