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Image Data Compression Method for Oblique Scanning in Direct Write Lithography System

A technology of image data and lithography system, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of increasing design workload and failing to meet the requirements of resolution improvement, and achieves simple compression method, Fast search positioning, fast effect

Active Publication Date: 2014-10-15
中夏芯基(上海)科技有限公司
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Problems solved by technology

[0004] In the direct writing exposure system, the ratio of oblique scanning to reduce the size of the grid is related to the tilt of the micromirror DMD. The reduction of the grid size means that the increase of the bitmap ruler is multiplied. The increase ratio is the square of the reduction ratio of the grid size, such as micro The mirror DMD tilt factor is N, the grid size is reduced to 1 / N of the original size, and the data volume of the bitmap is increased by N 2 , directly causing the pressure of data transmission
Due to the limited bandwidth of data transmission, increasing the bandwidth of data transmission will change the existing design, and it cannot meet the requirements of resolution improvement, and will introduce unknown risks and increase the design workload

Method used

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  • Image Data Compression Method for Oblique Scanning in Direct Write Lithography System

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Embodiment

[0032] The method for compressing obliquely scanned image data in a direct-write lithography system is characterized in that: N rows of bitmap data are compressed at the same time, and the compressed N×N bitmap data is in units of words, and the compressed data is sequentially as follows: Line start flag, compressed quantity, bitmap data or bitmap compressed data; N is equal to 4 or 5, bitmap compressed data and start flag are N×N bitmaps that will not appear, N×N that will not appear N-bit images can be arranged in rows or columns;

[0033] Suppose N×N=4×4;

[0034] Specific steps are as follows:

[0035] (1) Read 4 lines of bitmap data and create a compression buffer;

[0036] (2) Compress the line start flag HEX number 0xA5A5, and then press 0xFFFF;

[0037] (3) Take out the 4×4 bitmap data to form a 16-bit number, and clear the count value cnt;

[0038] (4) All-white detection is the count plus 1, and the 4×4 bitmap data is repeatedly taken out for all-white detect...

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Abstract

The invention discloses a tilt-scanned image data compression method in a direct-write lithography system. According to the invention, N*N bitmap data is read each time; characters are adopted as units, and N lines of bitmap data are compressed at a same time. The compressed data are sequentially line-starting mark, quantity after compression, and bitmap data or bitmap compression data. The bitmap compression data and the starting mark are non-appearing N*N bitmap. The compression method provided by the invention is simple and fast. The data obtained after data compression can be transmitted with a line manner, and the speed is easy to control.

Description

technical field [0001] The present invention relates to the photolithography field of the semiconductor industry and the printed circuit board industry, in particular to a method for compressing obliquely scanned image data in a direct-write photolithography system, in particular to a direct-write photolithography machine used in a spatial light modulator Compression processing method during transmission of oblique scanning image data of exposure system or laser direct writing exposure system (LDI). Background technique [0002] The oblique scanning working mode is adopted in the direct writing exposure system, which is a method to enhance the resolution of the image. Graphics are designed in the format of vector graphics. The images in the direct writing exposure system must be raster graphics. Vector graphics can be arbitrarily enlarged, reduced, and rotated without distortion. Therefore, the preservation and design of normal graphics The vector format is used, but the pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 陈勇陈修涛张爱民
Owner 中夏芯基(上海)科技有限公司
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