Standard gas distributing instrument and temperature compensation control device and temperature compensation method
A technology of standard gas distribution and temperature compensation, which is applied in the field of temperature compensation control device, standard gas distribution instrument, and temperature compensation, which can solve the problems of flow control and accuracy of standard gas distribution instrument.
Active Publication Date: 2014-12-10
BEIJING SDL TECH
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Problems solved by technology
However, mass flow controllers have temperature drift. In different ambient temperatures, due to temperature interference, the temperature drift of the two mass flow controllers is different, which will affect the flow control, thereby affecting the accuracy of the standard gas distribution instrument.
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[0028] The core of the present invention is to provide a temperature compensation control device for a standard gas distribution instrument, which can eliminate the interference of temperature on a mass flow controller, thereby improving the accuracy of the standard gas distribution instrument. Another core of the present invention is to provide a standard gas distribution instrument comprising the above-mentioned temperature compensation control device. Another core of the present invention is to provide a temperature compensation method based on the above temperature compensation control device.
[0029] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0030] Please refer to figure 1 , figure 1 It is a structural block diagram of a specific embodiment of the temperature compensation ...
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The invention discloses a temperature compensation control device of a standard gas distributing instrument. The temperature compensation control device comprises a detection element and a control element. The detection element is used for detecting the temperature of the work environment of the standard gas distributing instrument and transmitting a detected temperature signal to the control element; the control element stores predetermined temperature sections and configuration coefficients corresponding to different temperature sections inside, judges the temperature section according to the received temperature signal and dispatches the configuration coefficient matched with the temperature sections as well as increases the configuration coefficient in form of flow into a mass flow controller. At the moment, the mass flow controller outputs the flow after temperature compensation so as to control a gas circuit to output the compensated flow, eliminate the interference of temperature on the mass flow controller and improve the precision of the standard gas distributing instrument. The invention further discloses a standard gas distributing instrument comprising the temperature compensation control device and a temperature compensation method based on the temperature compensation control device.
Description
technical field [0001] The invention relates to the technical field of standard gas generating equipment, in particular to a temperature compensation control device for a standard gas distribution instrument. The present invention also relates to a standard gas distribution instrument comprising the above-mentioned temperature compensation control device, and a temperature compensation method based on the temperature compensation control device. Background technique [0002] With the continuous improvement of people's awareness of environmental protection, various gas pollution accidents have been highly valued by the country. The occurrence of pollution accidents is a risk factor that destroys the ecological environment and threatens human health; Instruments for gas indicators can monitor the content of dangerous gases in real time, and it is imminent to improve the level of environmental risk identification, assessment, prevention, and emergency response. [0003] The st...
Claims
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IPC IPC(8): G05D23/20B01F15/04B01F15/00
Inventor 韩占恒
Owner BEIJING SDL TECH