Hydrostatic swivel bearing assembly and grinding and polishing machine for vertical shafting

Abstract

The invention discloses a hydrostatic rotational supporting component for a vertical shafting, comprising an upper hydrostatic bearing, a lower hydrostatic bearing, a thrust ring, an inner sleeve and an outer sleeve. The inner sleeve is connected with a rotational component; the outer sleeve is connected with a fixed component; the upper part of the inner sleeve is provided with a thrust shaft shoulder; the thrust ring is fixed on the lower part of the inner sleeve; the outer sleeve is sleeved outside the inner sleeve; the inner wall of the outer sleeve is provided with a thrust lug boss; the thrust lug boss is located between the thrust shaft shoulder and the thrust ring; the upper hydrostatic bearing is arranged between the thrust shaft shoulder and the thrust ring; and the lower hydrostatic bearing is arranged between the thrust shaft shoulder and the thrust ring. The hydrostatic rotational supporting component for the vertical shafting is simple and compact in structure and convenient to overhaul, can be assembled and disassembled rapidly and conveniently, has high rotating precision, is very suitable for precision and ultra-precision grinding. The invention also discloses a grinding and polishing machine, wherein the main shaft of the lower grinding disc of the grinding and polishing machine is driven by the hydrostatic rotational supporting component.

Description

Technical field [0001] The invention relates to a hydrostatic rotating support structure of a vertical shaft system and a precision ultra-precision grinding and polishing machine, in particular to a hydrostatic rotating support assembly for a vertical shaft system and a grinding and polishing machine. Background technique [0002] The precision ultra-precision grinding and polishing machine is mainly used for processing non-metallic materials such as sapphire substrates, crystals, silicon wafers, optoelectronic materials, optical glass, mobile phone glass, mobile phone touch screens, ceramic wafers, quartz wafers, graphite sealing rings and silicon wafers. Surface and double-sided grinding, and can also be used for copper, iron, aluminum, stainless steel, mold steel, plastics, aluminum alloys, zinc alloys, titanium alloys, nickel alloys, tin alloys, hard alloys, carbon steels and tungsten steels. One-sided and double-sided grinding of various metal materials. The rotor of the gr...

AI Technical Summary

Problems solved by technology

Its disadvantages are: (1) The rotor part is not a separate functional part and cannot be designed and manufactured separately. The accuracy of assembly to the overall grinding and polishing machine depends on the accuracy of the sleeve and the internal shafting. The assembly period is long and the cost is high. Assembly The accuracy should not be guaranteed, and it is difficult to maintain and disassemble; (2) The rolling bearing in the rolling bearing component rotates under the contact state, and there is inevitably friction and fatigue wear, and the service life is short. After working for a period of time, the main shaft must be disassembled for maintenance

Therefore, the rotor of the existing precision ultra-precision grinding and polishing machine is not suitable for the requirements of short production cycle, high assembly precision, high grinding and polishing precision, and convenient maintenance and disassembly.

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