Seebeck/peltier thermoelectric conversion device employing a stack of alternated nanometric layers of conductive and dielectric material and fabrication process
A dielectric and multi-layer stacking technology, applied in the manufacture/processing of thermoelectric devices, thermoelectric devices that only use the Peltier or Seebeck effect, etc., can solve problems such as photolithography processing
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[0055] The exemplary embodiments presented below have exclusively illustrative purposes and are not intended to limit the invention, which may be practiced by any person skilled in the art, even by changing the deposition-oxidation process, or using different conductivity or semiconductivity conductive materials and different dielectric materials.
[0056] refer to figure 1 , in constructing the multilayer stack of the present invention, one may start with the first electrical conductivity of doped silicon C1 deposited in a nanometer thickness over a substantially planar dielectric substrate S (e.g. a planar glass plate) by layer: at a temperature of 600-800°C, put in N 2 A suitable dopant compound such as pH diluted in 3 , AsH 3 or B 2 h 6 and silane (SiH 4 ) gas phase (CVD or LP-CVD) into a low-pressure, heated deposition chamber.
[0057] This first nano-layer C1 of doped silicon semiconductor may have a substantially uniform thickness of about 40-50 nm, with little ...
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Abstract
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