Polycrystalline silicon production process
A production process, polysilicon technology, applied in the direction of silicon, etc., can solve the problems of energy consumption reduction, complex equipment and process flow, etc., and achieve the effect of reducing operating costs, reducing one-time investment and operating costs
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Embodiment 1
[0031] like figure 1 As shown, in the polysilicon production process of the present invention, industrial silicon powder reacts with silicon tetrachloride and hydrogen in the reactor in the hydrochlorination process to generate hydrogen and mixed chlorosilanes of trichlorosilane and silicon tetrachloride, which are passed through low temperature Condensation Condensate trichlorosilane and silicon tetrachloride, hydrogen is sent to the purifier, and the condensed mixed chlorosilane of trichlorosilane and silicon tetrachloride is sent to the primary rectification process, and the working pressure of the purifier is 1.5Mpa ;
[0032] The trichlorosilane and silicon tetrachloride mixed chlorosilanes from the hydrochlorination process are separated in the primary rectification process to remove high and low boilers, and the silicon tetrachloride is sent to the hydrochlorination process for recycling. The purity produced by the primary rectification is 99.99% The above high-purity...
Embodiment 2
[0038] like figure 1 As shown, in the polysilicon production process of the present invention, industrial silicon powder reacts with silicon tetrachloride and hydrogen in the reactor in the hydrochlorination process to generate hydrogen and mixed chlorosilanes of trichlorosilane and silicon tetrachloride, which are passed through low temperature Condensation Condensate trichlorosilane and silicon tetrachloride, send hydrogen to the purifier, and send the mixed chlorosilane of trichlorosilane and silicon tetrachloride to the primary rectification process, and the working pressure of the purifier is 2.0Mpa ;
[0039]The trichlorosilane and silicon tetrachloride mixed chlorosilanes from the hydrochlorination process are separated in the primary rectification process to remove high and low boilers, and the silicon tetrachloride is sent to the hydrochlorination process for recycling. The purity produced by the primary rectification is 99.99% The above high-purity trichlorosilane i...
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