Low temperature sintering piezoelectric ceramic material and preparation method thereof

A piezoelectric ceramic, low temperature sintering technology, applied in the field of new inorganic non-metallic materials, can solve the problems of high sintering temperature, deterioration of piezoelectric performance, poor repeatability, etc. Deterioration and effect of improving sintering properties

CN102850050AInactive Publication Date: 2013-01-02HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2013-01-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a low temperature sintering piezoelectric ceramic material, wherein composition of the material is represented by a chemical general formula Pb(0.995-a-b-3c / 2)BaaSrbFec(Zn1 / 3Nb2 / 3)xZryTi(1-x-y)O3+u%Li2CO3+v%M2O3+w%ZnO, M is a trivalent metal element, a molar ratio of Ba to Sr to Fe to (Zn1 / 3Nb2 / 3) to Zr is a:b:c:x:y, a is more than or equal to 0 and is less than or equal to 0.05, b is more than or equal to 0 and is less than or equal to 0.03, c is more than or equal to 0 and is less than or equal to 0.01, x is more than or equal to 0.25 and is less than or equal to 0.35, y is more than or equal to 0.30 and is less than or equal to 0.40, the Pb(0.995-a-b-3c / 2)BaaSrbFec(Zn1 / 3Nb2 / 3)xZryTi(1-x-y)O3 is adopted as matrix ceramic powder, u% represents a weight percentage of Li2CO3 in the matrix ceramic powder, v% represents a weight percentage of M2O3 in the matrix ceramic powder, w% represents a weight percentage of ZnO in the matrix ceramic powder, u is more than 0 and is less than or equal to 1, v is more than 0 and is less than or equal to 2, and w is more than 0 and is less than or equal to 0.2. According to the present invention, an oxide dopant is added and combined, such that a sintering temperature of the ceramic can be reduced to a temperature of 900 DEG C from a temperature of 1200 DEG C, a high piezoelectric constant (d33 is more than or equal to 450 pC / N ), a high electromechanical coupling coefficient (KP is more than or equal to 0.60), a high Curie point (Tc is more than 350 DEG C) and a moderate dielectric constant (epsilonr is 2000-3500) can be obtained, and application requirements on the ceramic material by the laminated piezoelectric driver are met.
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Description

technical field

[0001] The invention belongs to the field of novel inorganic non-metallic materials, and more specifically relates to a low-temperature sintered piezoelectric ceramic material and a preparation method thereof. Background technique

[0002] Piezoelectric ceramic micro-actuators are solid-state actuators manufactured using the inverse piezoelectric effect, and are widely used in high-tech fields such as precision optics, micro-mechanics, and micro-electronics technology. These applications require piezoelectric ceramic devices to develop in the direction of small size, low driving voltage, large displacement, and integration. As the core material of the driver, piezoelectric ceramic materials are required to have the characteristics of high sensitivity, large static output torque, and good temperature stability. The specific requirements for the performance of piezoelectric driving materials are: high piezoelectric constant to achieve low voltage driving and L...

Examples

Embodiment Construction

[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0024] In the embodiment of the present invention, with general chemical formula: Pb (0.995-a-b-3c / 2) Ba a Srb Fe c (Zn 1 / 3 Nb 2 / 3 ) x Zr y Ti (2-x-y) o 3 +u%Li 2 CO 3 +v%M 2 o 3 +w%ZnO represents the composition of the piezoelectric ceramic material, where M is a trivalent metal element, Ba, Sr, Fe, (Zn 1 / 3 Nb 2 / 3 ) and the molar ratio of Zr is a:b:c:x:y, 0≤a≤0.05; 0≤b≤0.03; 0≤c≤0.01; 0.25≤x≤0.35; 0.30≤y≤0.40; Pb (0.995-a-b-3c / 2) Ba a Sr b Fe c (Zn 1 / 3 Nb 2 / 3 ) x Zr y Ti (1-x-y) o 3 Indicates the matrix ceramic powder, u% indicates Li 2 CO 3 Accounting for the weight perce...