An Accurate Measuring System for the Relative Time Difference of Two Feedback Signals
A feedback signal, accurate measurement technology, applied in the field of excimer laser dual-cavity discharge synchronization, can solve problems such as inability to eliminate errors
Active Publication Date: 2016-03-16
ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology
The existing technology can only reduce the timing error of dual-cavity discharge, but cannot eliminate the error, and the resulting error is called "jitter"
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[0017] As shown in the attached figure, the precise measurement system for the relative time difference of the two feedback signals includes the relative time difference pulse signal acquisition module 1 and the time-to-digital conversion (TDC) system of the two feedback signals laser1 and laser2, and the two feedback signals laser1 and laser2 respectively pass through After filtered by the filter, it is connected to the comparator, and after being isolated by the isolator, it is sent to the relative time difference pulse signal acquisition module 1. The relative time difference pulse signal acquisition module includes 4 D flip-flops 2, two AND gates 3 and an OR gate In circuit 4, the two feedback signals laser1 and laser2 are respectively connected to the clock input terminals CP of two D flip-flops 2, and the four D flip-flops 2 are divided into two groups, one D flip-flop 2 connected to the feedback signal laser1 and one connected to The D flip-flops 2 that input the feedbac...
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The invention discloses a precision measurement system for a relative time difference of two-channel feedback signals. The precision measurement system comprises a TDC (time-to-digital conversion) system and a relative time difference pulse signal acquisition module for the two-channel feedback signals. The two-channel feedback signals are filtered, compared and isolated prior to being sent to the relative time difference pulse signal acquisition module, so that relative time difference pulse signals of the two-channel feedback signals are obtained; and then the relative time difference pulse signals are sent to the TDC system and processed by the same, the TDC system is communicated with an MCU (microprogrammed control unit) through an SPI (serial peripheral interface) and sends a pulse signal difference to the MCU, and the pulse signal difference is displayed by a nixie tube. The precision measurement system is capable of precisely measuring the dual-chamber discharge time difference of an MOPA (master oscillator power amplifier) and controlling the errors within 1ns and sends the time difference to a synchronous system, so that the purpose of MOPA dual-chamber synchronous discharge adjustment is achieved.
Description
technical field [0001] The invention relates to the field of dual-cavity discharge synchronization of excimer lasers, in particular to the synchronous control of MOPA dual-cavity gas discharge of a high-repetition-frequency ArF excimer laser used as a photolithography light source, and specifically relates to an accurate measurement system for the relative time difference of two feedback signals. Background technique [0002] At present, excimer laser is the main light source for lithography of large-scale semiconductor integrated circuits. With the increase of light source output power and linewidth requirements for lithography, it is difficult for single-cavity excimer lasers to meet the requirements of linewidth and power at the same time. The main oscillator-oscillation amplification technology of dual-cavity structure is introduced to solve this contradiction. The basic idea is to use the seed cavity to generate small-energy narrow-linewidth seed light, inject it into ...
Claims
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IPC IPC(8): G01M11/00
Inventor 李友布鲍健梁勖赵家敏王效顺钱小东
Owner ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI