Ceramic capacitive pressure sensor

Abstract

The invention provides a ceramic capacitive pressure sensor and relates to an electrostatic capacitive pressure sensor and a manufacturing process of the ceramic capacitive pressure sensor. At present, according to the electrostatic capacitive pressure sensor, plate electrodes are respectively arranged on the surfaces of two ceramic substrates, so that a small gap is formed between the two electrodes, the two electrodes are parallelly opposite to each other, the two parallel ceramic substrates are fixed into a whole to form a plate condenser, and the pressure is detected by testing the capacitance change under pressure. The capacitance is determined by the distance between polar plates, so that the pressure detection accuracy is influenced; and therefore, the distance between the electrodes must be accurately controlled. An annular low temperature co-fired ceramic (LTCC) green sheet is arranged between two plates, the LTCC green sheet and the two plates are stacked together, clamped by a clamp and sintered into a whole at a certain temperature, and the accurate distance and pressure detection precision between the polar plates are guaranteed.

Description

technical field [0001] The invention relates to an electrostatic capacitive pressure sensor and a manufacturing process thereof. Background technique [0002] At present, the electrostatic capacitive pressure sensor is provided with flat electrodes on the surfaces of two ceramic substrates, so that the two electrodes are separated by a small gap in parallel, and the two parallel ceramic substrates are fixed together to form a flat capacitor. When the above-mentioned substrate is subjected to external pressure, elastic bending occurs in the thickness direction of the plate, resulting in a change in electrostatic capacitance value. By detecting the change in capacitance value, the external pressure on the above-mentioned substrate can be obtained. [0003] Because the distance between the plates determines the size of the capacitance, and the initial capacitance is determined by the initial distance between the plates, in order to ensure uniform detection accuracy, the distanc...

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Problems solved by technology

[0006] The method of D-240500 mentioned above uses small balls to solve the problem of the accuracy of the spacers, but it cannot avoid the problem of the flow of welded materials. The method of patent 03131277.2 requires the production of ring-shaped spacers, and the precise control of the thickness of the ring-shaped spacers is also a problem.

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