Workpiece transfer system
A technology for conveying systems and workpieces, applied to conveyor objects, transportation and packaging, etc., can solve the problems of exhausted queuing time, process defects, and decreased production efficiency, so as to reduce lag time, improve transmission efficiency, and reduce waiting time. Effect
Active Publication Date: 2017-09-29
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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Problems solved by technology
This design is mainly due to the limitation of space utilization and cost factors. In the case of relatively large transmission volume, the workpieces on the trolley cannot be put down in time because of the inability to complete the pick-up and put-down at the same time, or wait to be sent away. The workpieces cannot be taken away in time because there is no vacant trolley. On the one hand, the workpiece may miss the best follow-up process time or have some process defects due to the exhaustion of queuing time. The resulting rework is more likely to occupy the effective production time. Reduce production efficiency; on the other hand, the setting of a single lift has also become a bottleneck for further improvement of production efficiency
Method used
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[0021] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0022] Such as figure 1 , figure 2 As shown, the workpiece transmission system of the first embodiment of the present invention includes: a transverse driving device (not shown in the accompanying drawings), two transverse guide rails 10, slide blocks 20 and first and second elevators ( figure 2 It is a top view of the workpiece conveying system of the first embodiment when no workpiece is carried). The two elevators are respectively fixed at different positions of the slider 20, and the lateral driving device drives the slider 20 to move along the lateral guide rail 10, thereby driving the first and second elevators to move laterally.
[0023] The first elevator comprises a loading table 32, a longitudinal guide rail 31, and a first longitudinal driving device (not shown in the accompanying drawings), the loading table 32 is us...
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The invention relates to a workpiece transmission system, comprising a transverse driving device, a transverse guide rail, a slide block and at least one lifter, each lifter is fixed at a different position of the slide block, and the transverse drive device drives the slide block to move along the transverse guide rail, and each lifter includes A loading platform, at least one longitudinal guide rail, and a longitudinal driving device, the loading platform is used for carrying workpieces, and the longitudinal driving device drives the loading platform to move vertically along the longitudinal guiding rail. It installs more than two elevators in a limited space, which can work together without affecting each other, thereby improving the transmission efficiency of the workpiece and the production efficiency of the semiconductor manufacturing process.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, and more specifically, to a work piece transmission system. Background technique [0002] In the field of semiconductor manufacturing, due to the particularity of chip manufacturing, in order to shorten the production cycle and improve the turnover rate has become an increasingly important issue in chip manufacturing. The importance of automated workpiece transfer systems as the link connecting the various manufacturing modules is also increasingly highlighted. [0003] Current automated workpiece transfer systems typically use a single lift. This design is mainly due to the limitation of space utilization and cost factors. In the case of relatively large transmission volume, the workpieces on the trolley cannot be put down in time because of the inability to complete the pick-up and put-down at the same time, or wait to be sent away. The workpieces cannot be taken away in time becaus...
Claims
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IPC IPC(8): H01L21/677
Inventor 戴文俊
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT