Device for calibrating static and dynamic characteristics of contact probe type contourgraph sensor

Abstract

The invention discloses a device for calibrating static and dynamic characteristics of a contact probe type contourgraph sensor. The device comprises a static displacement performing device, a dynamic displacement performing device and a displacement measuring device, wherein the static displacement performing device comprises a base, a right bearing seat, left bearing seat, a ball screw, an oblique block, an x-direction linear guide rail sliding block, a first linear guide rail, a second linear guide rail, a z-direction working table and a z-direction support frame. The oblique block is fixed on the x-direction linear guide rail sliding block, the sliding block is installed on the first linear guide rail, and the first linear guide rail is fixedly connected with the base. The ball screw penetrates through the center of the oblique block, and two ends of the ball screw are respectively fixed on the right bearing seat and the left bearing seat. The second linear guide rail is fixed on an oblique plane of the oblique block. The z-direction working table is connected with the z-direction support frame, and the z-direction support frame is connected with the base. The z-direction working table and the second linear guide rail convert x-direction movement into z-direction movement through sliding friction. The device for calibrating the static and dynamic characteristics of the contact probe type contourgraph sensor has the advantages of being high in calibrating accuracy, large in calibrating range, high in calibrating speed, simple in structure and low in cost.

Description

technical field [0001] The invention belongs to the technical field of measuring device verification, and more specifically relates to a verification device for the static and dynamic characteristics of a stylus profiler sensor. Background technique [0002] At present, the detection of high-end surface topography needs to reach the level of several mm range and nanometer resolution. The stylus sensor is located at the input end of the stylus profiler and is the primary link of the entire profiler system, and its performance directly affects the accuracy characteristics of the instrument system. In order to meet the detection requirements of high-end surface topography, the requirements for dynamic and static characteristics of stylus profiler sensors are getting higher and higher. [0003] According to the calibration specification of the stylus surface roughness measuring instrument, there are three deficiencies in the calibration of the stylus profiler sensor in the cali...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the defects of the prior art, the object of the present invention is to provide a verification device for the static and dynamic characteristics of the stylus profiler sensor, which aims to solve the problem of using the engraved line template for the verification of the stylus profiler sensor in the prior art. The verification range is small, the following performance verification is insufficient during dynamic verification, and there is a lack of multiple single-point error evaluations for the full range of the stylus profiler sensor

Images