Heater of batch-type heat treatment device

A technology of heat treatment device and heater, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of lower productivity, long time, and lower productivity of heat treatment process, and achieve the effect of increasing productivity and shortening time

Inactive Publication Date: 2013-03-20
TERASEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Furthermore, the conventional heat treatment apparatus has the problem of lowering the productivity of the heat treatment process because it takes a long time to unload the substrate from the heat treatment apparatus after the heat treatment process is completed.
This decrease in productivity is due to the following reasons. In order to prevent damage to the substrate caused by thermal shock, it is necessary to cool the inside of the chamber to a temperature below the specified temperature after the heat treatment process is completed before unloading the substrate. Internal temperature process takes longer

Method used

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  • Heater of batch-type heat treatment device
  • Heater of batch-type heat treatment device
  • Heater of batch-type heat treatment device

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Embodiment Construction

[0067] Hereinafter, the configuration of the present invention will be described in detail with reference to the drawings.

[0068] figure 1 as well as figure 2 It is a perspective view showing the structure of the batch heat treatment apparatus 1 according to one embodiment of the present invention. exist figure 1 as well as figure 2 In FIG. 2 , the outline of the unit main heater 200 is schematically shown for convenience, and the arrangement state of the unit main heater 200 in the batch type heat treatment apparatus 1 is shown.

[0069] image 3 It is a perspective view showing the arrangement state of the substrate 10, the main heating unit 120, and the auxiliary heating unit 140 of the batch heat treatment apparatus 1 according to an embodiment of the present invention.

[0070] First, the material of the substrate 10 loaded on the batch heat treatment device 1 is not particularly limited, and substrates 10 of various materials such as glass, plastic, polymer, sil...

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Abstract

The invention discloses a heater of a batch-type heat treatment device, the heater being suitable for the batch-type heat treatment device capable of performing heat treatment of a plurality of substrates simultaneously. The heater comprises: a first tube, a second tube, and a heating element. The second tube surrounds the first tube and has a certain distance to the first tube. The heating element is inserted into the first tube. Besides, the cooling gas flows through a space between the first and second tubes. According to the invention, the substrates loaded inside a cavity are heated by a plurality of the heaters corresponding to the substates, thereby realizing the effect of uniform heat treatment of the entire surface of a substrate.

Description

[0001] This application is a divisional application of an invention patent application with the national application number 200980122777.2, the date of entering the national phase is December 17, 2010, and the invention title is "batch type heat treatment device and heater suitable for the heat treatment device". technical field [0002] The present invention relates to a heater for a batch heat treatment device, and more specifically, to a heater capable of performing uniform heat treatment on the entire substrate area of ​​a plurality of substrates at the same time, and for rapidly cooling the heat treatment device after the heat treatment process is completed. A heater of a batch type heat treatment device that allows cooling gas to flow through the inside of the chamber. Background technique [0003] Annealing equipment used in the manufacture of semiconductors, flat panel displays, and solar cells is an equipment that performs heat treatment steps that are indispensable ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/324
CPCH01L21/6734H01L21/67109
Inventor 许官善康浩荣
Owner TERASEMICON CO LTD
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