Fluid feed pump, fluid circulation device, medical device and electronic device
A liquid-feeding pump and liquid technology, which is applied to the components of the pumping device for elastic fluid, mechanical equipment, liquid-variable-type machinery, etc. Problems such as decreased fluid volume efficiency and increased fluid delivery volume
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[0072] figure 1 It is an explanatory diagram showing the structure of the liquid-feeding pump of this embodiment. As shown in the figure, the liquid delivery pump 100 of this embodiment is relative to Figure 13 The illustrated liquid delivery pump is different in that an outlet-side buffer chamber 118 is provided. That is, in the liquid delivery pump 100 of this embodiment, a part of the pump chamber 102 is formed by the diaphragm 104, the piezoelectric element 106 is accommodated in the case 108, and the inlet side buffer is provided on the upper part of the pump chamber 102 through the check valve 110. Room 112. Liquid is supplied from the inlet channel 114 to the inlet-side buffer chamber 112 . The pump chamber 102 is connected to an outlet-side buffer chamber 118 through an outlet flow path 116 , and the outlet-side buffer chamber 118 is connected to a liquid flow path 122 .
[0073] When a driving signal is applied to the piezoelectric element 106 to expand the piezo...
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