Method for extracting error signal in three-dimensional active vibration isolation control system
A technology of active vibration isolation and error signal, applied in measurement devices, instruments, measurement acceleration and other directions, can solve problems such as the inability to meet the active vibration isolation function, and achieve the effect of avoiding interference
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[0017] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0018] The present invention provides a method for extracting error signals in a three-way active vibration isolation control system, as shown in the attached figure 2 with 3 As shown, in the active vibration isolator system, the three actuators respectively apply secondary excitation sources to the vertical, horizontal and vertical directions to suppress the vibration of the base, and the force sensor 3 is placed in the active vibration isolator shell 5 Between the upper splint 2, or between the active vibration isolator shell 5 and the base; correspondingly install the acceleration sensor 4 on the active vibration isolator shell near each force sensor 3; at this time, use the active vibration isolator shell The external acceleration sensor measures the acceleration response of the base in the three directions of horizontal x, vertical y, and vertical z...
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