Forming a device having a curved piezoelectric membrane

Abstract

Processes for forming an actuator having a curved piezoelectric membrane are disclosed. The processes utilize a profile-transferring substrate having a curved surface surrounded by a planar surface to form the curved piezoelectric membrane. The piezoelectric material used for the piezoelectric actuator is deposited on at least the curved surface of the profile-transferring substrate before the profile-transferring substrate is removed from the underside of the curved piezoelectric membrane. The resulting curved piezoelectric membrane includes grain structures that are columnar and aligned, and all or substantially all of the columnar grains are locally perpendicular to the curved surface of the piezoelectric membrane.

Description

technical field [0001] This specification relates to the manufacture of MEMS (microelectromechanical) actuators. Background technique [0002] Fluid ejection systems typically include a fluid path from a fluid supply to a nozzle assembly including nozzles from which droplets are ejected. Droplet ejection can be controlled by pressurizing the fluid in the fluid path with an actuator, such as a piezoelectric actuator. The fluid to be ejected may be, for example, an ink, an electroluminescent material, a biological compound, or a material forming an electrical circuit. [0003] A printhead module in an inkjet printer is an example of a fluid ejection system. A printhead module typically includes a chain or series of nozzles with a corresponding array of ink paths and associated actuators, and droplet ejection from each nozzle can be independently controlled by one or more controllers. The printhead module may include a semiconductor printhead body in which an ink path is for...

AI Technical Summary

Problems solved by technology

Small droplets are ideal when printing at around 1200dpi, but may not be suitable when printing at lower resolutions such as around 600dpi

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