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Method for adjusting stems equipped with aberration correctors

An aberration corrector, HR-STEM technology, applied in material analysis using radiation diffraction, discharge tubes, electrical components, etc., can solve problems such as limited resolution

Active Publication Date: 2016-09-28
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This amount of time and the interpolation process typically results in a setting change (eg due to drift or thermal changes) such that aberrations again limit the resolution

Method used

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  • Method for adjusting stems equipped with aberration correctors
  • Method for adjusting stems equipped with aberration correctors
  • Method for adjusting stems equipped with aberration correctors

Examples

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Embodiment Construction

[0065] In e.g. the earlier mentioned Lupini's paper of Figure 4 Examples of HR-STEM images and their representation in reciprocal space (Fourier space) are given in . Although Lupini uses the obtained representation in a different way, namely: for determining local magnification. exist Figure 4 In his off-axis representation (the representation of the sub-image) in , a slight asymmetry can be observed. This would be expected for such off-axis images, but also demonstrates the utility of the invention.

[0066] The pattern of points in reciprocal space is the transformation of the crystal in reciprocal space ("Fourier space") convolved with the transformation of the beam diameter (probe profile) in reciprocal space ("Fourier space") .

[0067] The transformation of the crystal is the diffraction pattern, which extends to a large distance from the center of the diffraction pattern. For a perfect crystal with infinite size, it extends to infinity.

[0068] The transformat...

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Abstract

The invention relates to a method for conditioning a STEM equipped with an aberration corrector. The present invention relates to a method for tuning a Cs corrector in a STEM using crystal samples. The method consists in recording the defocus series, transforming the obtained images into Fourier space, thus forming an image collection like a diffraction image. By subsequently determining the symmetry of the Fourier image, the corrector can be tuned for better symmetry, and by determining the maximum distance of the spot from the center, the transfer limit can be determined. By repeatedly performing these steps, the corrector can be tuned to its optimal performance.

Description

technical field [0001] The invention relates to a method for adjusting a scanning transmission electron microscope (STEM) equipped with an objective lens and an aberration corrector for correcting the aberrations of the objective lens, the corrector being excited by excitation and the objective lens focusing to Focus value F. [0002] The invention further relates to a sample carrier for carrying out the method, and the use of such a sample carrier for carrying out the method according to the invention. Background technique [0003] As known to those skilled in the art, high-end STEMs are equipped with correctors for correcting the spherical aberration of the objective lens. Such a calibrator is available, for example, from CEOS Gmbh., Heidelberg, Germany (CEOS), and is integrated in a commercial STEM such as the Titan 80-300 from FEI, Hillsboro, Oregon, USA. [0004] Such STEMs are used to image samples, for example from crystalline materials. Such samples may be semicon...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/28H01J37/22
CPCH01J37/153H01J37/20H01J37/265H01J37/28H01J2237/1532H01J2237/1534H01J2237/216H01J2237/221H01J2237/2802G01N23/20H01J37/22
Inventor M.比肖夫B.里格
Owner FEI CO