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Displacement detecting device, scale calibrating method and scale calibrating program

A technology of displacement detection and ruler, which is applied in measuring devices, adopting optical devices, converting sensor output, etc., can solve the problems of sensor arrangement spacing limitation, large cost and manpower, and expensive configuration

Active Publication Date: 2013-05-01
MITUTOYO CORP
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Therefore, the reduction of the sensor array pitch is limited
[0008] In addition, it is not appropriate to use high-precision displacement sensors such as laser interferometers, or to prepare reference sensors, etc., because such configurations become meaninglessly expensive
In the case of a measurement error of a non-negligible degree due to deformation of the scale at the time of installation, etc., it may be necessary to reset the reference displacement sensor, and still requires a lot of cost and labor

Method used

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  • Displacement detecting device, scale calibrating method and scale calibrating program
  • Displacement detecting device, scale calibrating method and scale calibrating program
  • Displacement detecting device, scale calibrating method and scale calibrating program

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Embodiment Construction

[0027] Hereinafter, the displacement detection device, the scale calibration method, and the scale calibration program according to the embodiments of the present invention will be described in detail with reference to the drawings.

[0028] figure 1 It is a schematic diagram showing the configuration of a photoelectric encoder constituting the displacement detection device according to an embodiment of the present invention. Such as figure 1 As shown, the photoelectric encoder 100 includes a scale 10, a detection unit 20, and a calculation unit 30. For example, in this embodiment, the photoelectric encoder 100 is formed as a reflection type.

[0029] For example, the scale 10 is constituted by a band-shaped scale, and has position information for detecting the positions of the measuring points of the detection sections 21, 22, and 23 (first, second, and third detection sections) constituting the detection unit 20. The scale 10 is installed so that the light rays irradiated from t...

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Abstract

A displacement detecting device includes: a scale (10) which has an optical lattice; a detecting unit (20) which is disposed so as to be movable in a scanning direction relative to the scale, inclusive of at least a first detection portion (21), a second detection portion (22) and a third detection portion (23), arranged in the scanning direction for detecting position information from the optical lattice; and a calculating portion (30) configured to obtain a self-calibration curve on graduations of the scale by specifying positions of the detection portions and calculating measurement error based on the position information detected by the detecting unit, wherein: the detecting unit is provided so that a distance between the first detection portion (21) and the second detection portion (22) and a distance between the second detection portion (22) and the third detection portion (23) are different from each other and do not form an integral multiple.

Description

Technical field [0001] The invention relates to a displacement detection device, a scale calibration method and a scale calibration program applied to linear encoders, rotary encoders and the like. Background technique [0002] The measurement error of displacement measuring devices such as encoders is usually evaluated before leaving the factory. A high-precision displacement sensor such as a laser interferometer is used as a reference for error evaluation. The error data thus obtained is shipped together with the encoder in the form of a checklist before leaving the factory to be used as important data for ensuring the performance of the encoder. [0003] However, when the encoder scale is attached to machine tools, measuring devices, etc., depending on the material and length of the scale and the fixing method, the encoder scale may be deformed. In some cases, the deformation of the ruler may cause measurement errors that cannot be ignored relative to the required specificatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01D5/24495G01D5/24452G01D18/001
Inventor 木村彰秀
Owner MITUTOYO CORP
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