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Reversing and pole inversing device

A technology of pole inversion and interface, which is applied in the field of reversing pole inversion device, can solve the problems that the liquid pump can not fully play its performance, and achieve the effect of increasing the scope of application and improving work efficiency

Active Publication Date: 2015-04-22
SHENYANG KINGSEMI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the deficiency that the above-mentioned liquid pump cannot be fully utilized, the object of the present invention is to provide a reversing and pole-reversing device

Method used

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  • Reversing and pole inversing device
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  • Reversing and pole inversing device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Embodiment 1 (two centrifugal units share a liquid pump)

[0024] The second interface B is used as a liquid path of the centrifugal unit, and the third interface C is used as the second liquid path of the centrifugal unit. Connect the outlet of the liquid pump to the first interface A and keep it unchanged, and block the fourth interface D.

[0025]The polarity reversal device of the present invention does not operate, and the third sealing rubber pad 13 and the fourth sealing rubber pad 14 on the second support plate 7 are respectively inserted in the through holes 19 on the side where they are located, while the first sealing rubber pad on the first support plate 6 The gasket 11 and the second sealing rubber gasket 12 are located above the side through hole 19, that is, the glue path between the first interface A and the second interface B is a passage; the liquid flows in from the first interface A and passes through the first interface A The glue path between the s...

Embodiment 2

[0029] The difference between the present embodiment and the first embodiment is that each of the two centrifugal units still uses a liquid pump. The second interface B is connected to a liquid pump of the centrifugal unit, the third interface C is connected to the second liquid pump of the centrifugal unit, and the two outlets are respectively connected to the first interface A and the fourth interface D. When the pole inverting device of the present invention is not in action, the third sealing rubber pad 13 and the fourth sealing rubber pad 14 on the second support plate 7 are inserted into the through holes 19 on the side respectively, and the first sealing rubber pad 14 on the first support plate 6 The rubber pad 11 and the second sealing rubber pad 12 are located above the side through hole 19, that is, the glue path between the first interface A and the second interface B is a passage, and the glue path between the third interface C and the fourth interface D The glue p...

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Abstract

The invention relates to inversing equipment for coating chemical agents on wafers, in particular to a reversing and pole inversing device for two units to share one liquid pump for liquid supply. The reversing and pole inversing device comprises a shell, four connectors positioned at four corners of the shell, an intermediate shaft and a motor, each two adjacent connectors are communicated through a rubber path, the intermediate shaft is arranged among the four connectors and relatively rotationally mounted in the shell, two ends of the intermediate shaft are in threaded connection with support plates respectively, sealing gaskets for controlling opening and closing of the rubber path between each two adjacent connectors are arranged at two ends of each support plate, the motor is mounted at the bottom of the shell, an output end of the motor is connected with the bottom end of the intermediate shaft, and a rotation pair, driven by the motor, of the intermediate shaft is changed into up-down sliding pairs of the support plates through threaded connection of the intermediate shaft and the support plates. By the reversing and pole inversing device, the liquid pump matched with two centrifugal units can give full play to maximum efficacy, the two centrifugal units share one liquid pump, and 'one in and two out' of the chemical agents is achieved.

Description

technical field [0001] The invention relates to a reversing device for coating chemical agents on a wafer, in particular to a reversing pole-reversing device in which two units of liquid supply share one liquid pump. Background technique [0002] At present, it is known that in the chemical agent coating process, each centrifugal unit has its own liquid pump; and during the operation of a piece of equipment, it is usually the case that when one centrifugal unit coats liquid, the other centrifugal unit does not. The coating process is temporarily processed in the waiting state, and the matching liquid pump cannot give full play to its performance. It is on standby for a large amount of time, which seriously wastes resources and low work efficiency. Contents of the invention [0003] In order to overcome the deficiency that the above-mentioned liquid pump cannot perform adequately, the object of the present invention is to provide a reversing and pole-reversing device. The ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D15/00
Inventor 童宇波
Owner SHENYANG KINGSEMI CO LTD