Jig for substrate inspection, base units of jig and substrate inspection apparatus

A substrate inspection and inspection-based technology, which is applied to measurement devices, measurement device housings, and electronic circuit testing, etc., can solve the problem of difficulty in ensuring the installation space of the position adjustment mechanism, and achieve the effect of stable electrical contact state.

Inactive Publication Date: 2013-05-08
NIDEC-READ CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, in the above configuration, the connection switching unit may become an obstacle, and it may be difficult to secure an installation space for the position adjustment mechanism.

Method used

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  • Jig for substrate inspection, base units of jig and substrate inspection apparatus
  • Jig for substrate inspection, base units of jig and substrate inspection apparatus
  • Jig for substrate inspection, base units of jig and substrate inspection apparatus

Examples

Experimental program
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Effect test

Embodiment Construction

[0043] refer to Figure 1 to Figure 5 , a substrate inspection apparatus to which a substrate inspection jig according to an embodiment of the present invention is applied will be described.

[0044] Such as figure 1 As shown, the substrate inspection apparatus 1 includes a substrate inspection jig 2 and an inspection apparatus main body 3 to which the substrate inspection jig 2 is mounted, and is used for inspection of electrical characteristics of a wiring pattern provided on a substrate to be inspected (not shown). Specific inspections include, for example, inspections of continuity of wiring patterns, inspections of insulation between wiring patterns, and the like.

[0045] Such as figure 1 As shown, the substrate inspection jig 2 includes a jig body 6 , an electrode unit 7 , and an inspection head 8 . In addition, the jig main body 6 and the electrode unit 7 may be collectively referred to as a jig base unit 9 in some cases.

[0046] The jig main body 6 is a part cons...

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PUM

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Abstract

The present invention provides a jig for substrate inspection and a related technique, which can reduce load in substrate inspection jig structure variation along with variation of an inspected substrate as an inspection object. The substrate inspection jig (2) is provided with the following components: a jig body (6), an electrode unit (7) and an inspection head (8). The electrode unit (7) is provided with a plurality of electrode heads which are approximately configured rectangularly and is replaceably mounted on a clamp body (6). The inspection head (8) is provided with a plurality of probes and probe keeping components and is replaceably mounted on the electrode unit (7) or the clamp body (6) so the back end of each probe electrically contacts with a random electrode head of the electrode unit (7). The electrode heads of the electrode unit (7) are approximately configured rectangularly through a mounting distance which is smaller than that of the probes of the inspection heads (8) so that the jig can correspond to a plurality of kinds of inspection heads (8) with different configuration modes on the probes.

Description

technical field [0001] The present invention relates to a substrate inspection jig mounted on a substrate inspection device and used in inspections related to electrical characteristics of wiring patterns provided on a substrate to be inspected, and related technologies. Background technique [0002] As a conventional substrate inspection jig, there is a substrate inspection jig in which the configuration of the electrode part provided on the electrode unit is a general-purpose configuration corresponding to various inspection heads with different probe arrangements, and can be used as the substrate inspection jig. The inspection head is replaced according to the configuration of the wiring pattern and the like of the inspected substrate to be inspected. [0003] Furthermore, in the substrate inspection apparatus using the above-mentioned conventional substrate inspection jig, a connection switching unit for switching the electrical connection relationship between the electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/04G01R31/28
CPCG01R1/073G01R31/282G01R31/2886
Inventor 藤野真
Owner NIDEC-READ CORPORATION
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